A three-dimensional MEMS optical switching module having 100 input and 100 output ports

Tsuyoshi Yamamoto, Johji Yamaguchi, Nobuyuki Takeuchi, Akira Shimizu, Eiji Figurashi, Renshi Sawada, Yuji Uenishi

    研究成果: Contribution to journalArticle査読

    33 被引用数 (Scopus)

    抄録

    This paper describes an optical switching module based on microelectromechanical systems (MEMS) two-axis tilt mirror arrays and low-cost highly accurate free-space optics. The MEMS mirror arrays are integrated on single-crystal silicon wafers and provide reliable switching operation at a low driving voltage. The free-space optics consists of two-dimensional optical fiber and microlens arrays based on low-cost and highly accurate polymer-based components. They provide a compact switching module (approximately 80 × 60 × 35mm [170 cc]) and are assembled passively by using dowel pins. A prototype switch module with 100-ch optical fiber I/O has a low coupling loss of 4.0 dB, a low crosstalk within -60 dB, and switching time of 3 ms.

    本文言語英語
    ページ(範囲)1360-1362
    ページ数3
    ジャーナルIEEE Photonics Technology Letters
    15
    10
    DOI
    出版ステータス出版済み - 10 2003

    All Science Journal Classification (ASJC) codes

    • 電子材料、光学材料、および磁性材料
    • 原子分子物理学および光学
    • 電子工学および電気工学

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