TY - JOUR
T1 - A Transition Edge Sensor Microcalorimeter System for the Energy Dispersive Spectroscopy Performed on a Scanning-Transmission Electron Microscope
AU - Maehata, K.
AU - Hara, T.
AU - Mitsuda, K.
AU - Hidaka, M.
AU - Tanaka, K.
AU - Yamanaka, Y.
N1 - Publisher Copyright:
© 2015, Springer Science+Business Media New York.
PY - 2016/7/1
Y1 - 2016/7/1
N2 - We are conducting the development of a transition edge sensor (TES) microcalorimeter system for energy-dispersive X-ray spectroscopy (EDS), performed using a scanning-transmission electron microscope (STEM). The operating temperature of the TES microcalorimeter was maintained using a compact dry 3He-4He dilution refrigerator. This was pre-cooled by a remote helium cooling loop system and a Gifford-McMahon cooler. These conditions allowed for high-resolution STEM imaging to be achieved. A single-pixel TES microcalorimeter with a polycapillary optic was selected to demonstrate the analytical operation of the EDS system in the STEM. For a Ti-It-Pt sample, an X-ray energy resolution of 8.6 eV full-width at half maximum (FWHM) was obtained at Ir Mα 1, Pt Mα 1, and Ir Mβ. Using an electron device sample, element distribution maps of Si, Ti, and W were obtained using a Si Kα 1 X-ray energy resolution of 9.7 eV FWHM.
AB - We are conducting the development of a transition edge sensor (TES) microcalorimeter system for energy-dispersive X-ray spectroscopy (EDS), performed using a scanning-transmission electron microscope (STEM). The operating temperature of the TES microcalorimeter was maintained using a compact dry 3He-4He dilution refrigerator. This was pre-cooled by a remote helium cooling loop system and a Gifford-McMahon cooler. These conditions allowed for high-resolution STEM imaging to be achieved. A single-pixel TES microcalorimeter with a polycapillary optic was selected to demonstrate the analytical operation of the EDS system in the STEM. For a Ti-It-Pt sample, an X-ray energy resolution of 8.6 eV full-width at half maximum (FWHM) was obtained at Ir Mα 1, Pt Mα 1, and Ir Mβ. Using an electron device sample, element distribution maps of Si, Ti, and W were obtained using a Si Kα 1 X-ray energy resolution of 9.7 eV FWHM.
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U2 - 10.1007/s10909-015-1361-3
DO - 10.1007/s10909-015-1361-3
M3 - Article
AN - SCOPUS:84947435217
VL - 184
SP - 5
EP - 10
JO - Journal of Low Temperature Physics
JF - Journal of Low Temperature Physics
SN - 0022-2291
IS - 1-2
ER -