Ab initio energetic calculations of elementary reactions relevant to low-temperature silane oxidation by gaussian-2 theory
Shigeo Kondo, Kazuaki Tokuhashi, Hidekazu Nagai, Akifumi Takahashi, Masahiro Kaise, Masaaki Sugie, Mutsumi Aoyagi, Koichi Mogi, Satoshi Minamino
研究成果: Contribution to journal › Article › 査読
14
被引用数
(Scopus)