Aberration-corrected focused ion beam for time-of-flight secondary neutral mass spectrometry

Kosuke Nagata, Ken Ichi Bajo, Satoru Itose, Miyuki Matsuya, Morio Ishihara, Kiichiro Uchino, Hisayoshi Yurimoto

研究成果: ジャーナルへの寄稿記事

抄録

A chromatic and spherical aberration corrector with liquid Ga ion metal source was developed. The aberration corrector reduced the ion probe diameter to ∼1.5 times smaller for the 69Ga+ beam in aberration correction mode compared with the corrector in non-aberration correction mode. The probe current at a given probe size is approximately two times larger in aberration correction mode than in non-aberration correction mode. The aberration-corrected focused ion beam yields higher lateral resolutions and higher sensitivities with lower acceleration voltage for the same acquisition time down to 10 nm with a current of 1 pA.

元の言語英語
記事番号085005
ジャーナルApplied Physics Express
12
発行部数8
DOI
出版物ステータス出版済み - 1 1 2019

Fingerprint

Focused ion beams
Aberrations
Mass spectrometry
aberration
mass spectroscopy
ion beams
ion probes
probes
Metal ions
metal ions
acquisition
sensitivity
Ions
Liquids
Electric potential
electric potential
liquids

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy(all)

これを引用

Aberration-corrected focused ion beam for time-of-flight secondary neutral mass spectrometry. / Nagata, Kosuke; Bajo, Ken Ichi; Itose, Satoru; Matsuya, Miyuki; Ishihara, Morio; Uchino, Kiichiro; Yurimoto, Hisayoshi.

:: Applied Physics Express, 巻 12, 番号 8, 085005, 01.01.2019.

研究成果: ジャーナルへの寄稿記事

Nagata, Kosuke ; Bajo, Ken Ichi ; Itose, Satoru ; Matsuya, Miyuki ; Ishihara, Morio ; Uchino, Kiichiro ; Yurimoto, Hisayoshi. / Aberration-corrected focused ion beam for time-of-flight secondary neutral mass spectrometry. :: Applied Physics Express. 2019 ; 巻 12, 番号 8.
@article{a57b9abeeeb24afb9657ac07e8413629,
title = "Aberration-corrected focused ion beam for time-of-flight secondary neutral mass spectrometry",
abstract = "A chromatic and spherical aberration corrector with liquid Ga ion metal source was developed. The aberration corrector reduced the ion probe diameter to ∼1.5 times smaller for the 69Ga+ beam in aberration correction mode compared with the corrector in non-aberration correction mode. The probe current at a given probe size is approximately two times larger in aberration correction mode than in non-aberration correction mode. The aberration-corrected focused ion beam yields higher lateral resolutions and higher sensitivities with lower acceleration voltage for the same acquisition time down to 10 nm with a current of 1 pA.",
author = "Kosuke Nagata and Bajo, {Ken Ichi} and Satoru Itose and Miyuki Matsuya and Morio Ishihara and Kiichiro Uchino and Hisayoshi Yurimoto",
year = "2019",
month = "1",
day = "1",
doi = "10.7567/1882-0786/ab30e4",
language = "English",
volume = "12",
journal = "Applied Physics Express",
issn = "1882-0778",
publisher = "Japan Society of Applied Physics",
number = "8",

}

TY - JOUR

T1 - Aberration-corrected focused ion beam for time-of-flight secondary neutral mass spectrometry

AU - Nagata, Kosuke

AU - Bajo, Ken Ichi

AU - Itose, Satoru

AU - Matsuya, Miyuki

AU - Ishihara, Morio

AU - Uchino, Kiichiro

AU - Yurimoto, Hisayoshi

PY - 2019/1/1

Y1 - 2019/1/1

N2 - A chromatic and spherical aberration corrector with liquid Ga ion metal source was developed. The aberration corrector reduced the ion probe diameter to ∼1.5 times smaller for the 69Ga+ beam in aberration correction mode compared with the corrector in non-aberration correction mode. The probe current at a given probe size is approximately two times larger in aberration correction mode than in non-aberration correction mode. The aberration-corrected focused ion beam yields higher lateral resolutions and higher sensitivities with lower acceleration voltage for the same acquisition time down to 10 nm with a current of 1 pA.

AB - A chromatic and spherical aberration corrector with liquid Ga ion metal source was developed. The aberration corrector reduced the ion probe diameter to ∼1.5 times smaller for the 69Ga+ beam in aberration correction mode compared with the corrector in non-aberration correction mode. The probe current at a given probe size is approximately two times larger in aberration correction mode than in non-aberration correction mode. The aberration-corrected focused ion beam yields higher lateral resolutions and higher sensitivities with lower acceleration voltage for the same acquisition time down to 10 nm with a current of 1 pA.

UR - http://www.scopus.com/inward/record.url?scp=85071194027&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85071194027&partnerID=8YFLogxK

U2 - 10.7567/1882-0786/ab30e4

DO - 10.7567/1882-0786/ab30e4

M3 - Article

VL - 12

JO - Applied Physics Express

JF - Applied Physics Express

SN - 1882-0778

IS - 8

M1 - 085005

ER -