Ablation process of PMMA induced by irradiation with laser plasma EUV light

Nobuhiko Sugiura, Shuichi Torii, Tetsuya Makimura, Yoshiyuki Ichinosawa, Kouta Okazaki, Daisuke Nakamura, Akihiko Takahashi, Tatsuo Okada, Hiroyuki Niino, Kouichi Murakami

研究成果: 著書/レポートタイプへの貢献会議での発言

抄録

We have investigated ablation process of PMMA induced by irradiation with laser plasma EUV light. Appling the technique, micro-structured mold can be fabricated by transferring structures of the master PMMA plate.

元の言語英語
ホスト出版物のタイトル2013 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013
DOI
出版物ステータス出版済み - 10 18 2013
イベント10th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013 - Kyoto, 日本
継続期間: 6 30 20137 4 2013

出版物シリーズ

名前Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest

その他

その他10th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013
日本
Kyoto
期間6/30/137/4/13

Fingerprint

Polymethyl Methacrylate
Ablation
laser plasmas
ablation
Irradiation
Plasmas
irradiation
Lasers

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

これを引用

Sugiura, N., Torii, S., Makimura, T., Ichinosawa, Y., Okazaki, K., Nakamura, D., ... Murakami, K. (2013). Ablation process of PMMA induced by irradiation with laser plasma EUV light. : 2013 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013 [6600550] (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest). https://doi.org/10.1109/CLEOPR.2013.6600550

Ablation process of PMMA induced by irradiation with laser plasma EUV light. / Sugiura, Nobuhiko; Torii, Shuichi; Makimura, Tetsuya; Ichinosawa, Yoshiyuki; Okazaki, Kouta; Nakamura, Daisuke; Takahashi, Akihiko; Okada, Tatsuo; Niino, Hiroyuki; Murakami, Kouichi.

2013 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013. 2013. 6600550 (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest).

研究成果: 著書/レポートタイプへの貢献会議での発言

Sugiura, N, Torii, S, Makimura, T, Ichinosawa, Y, Okazaki, K, Nakamura, D, Takahashi, A, Okada, T, Niino, H & Murakami, K 2013, Ablation process of PMMA induced by irradiation with laser plasma EUV light. : 2013 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013., 6600550, Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest, 10th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013, Kyoto, 日本, 6/30/13. https://doi.org/10.1109/CLEOPR.2013.6600550
Sugiura N, Torii S, Makimura T, Ichinosawa Y, Okazaki K, Nakamura D その他. Ablation process of PMMA induced by irradiation with laser plasma EUV light. : 2013 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013. 2013. 6600550. (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest). https://doi.org/10.1109/CLEOPR.2013.6600550
Sugiura, Nobuhiko ; Torii, Shuichi ; Makimura, Tetsuya ; Ichinosawa, Yoshiyuki ; Okazaki, Kouta ; Nakamura, Daisuke ; Takahashi, Akihiko ; Okada, Tatsuo ; Niino, Hiroyuki ; Murakami, Kouichi. / Ablation process of PMMA induced by irradiation with laser plasma EUV light. 2013 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013. 2013. (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest).
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