Active control of melt convection of silicon by electromagnetic force under cusp-shaped magnetic fields

Koichi Kakimoto, Akimasa Tashiro, Hideo Ishii, Takashige Shinozaki

研究成果: Contribution to journalArticle査読

8 被引用数 (Scopus)

抄録

Three-dimensional time-dependent flow of silicon melt in an electromagnetic Czochralski system was numerically investigated. Four different positions of electrodes were taken into account to investigate the mechanism of heat and oxygen transfer in the melt under cusp-shaped magnetic fields. The results showed that the position of electrode plays an important role to control heat and oxygen transfer in silicon melt.

本文言語英語
ページ(範囲)341-345
ページ数5
ジャーナルMaterials Science in Semiconductor Processing
5
4-5 SPEC.
DOI
出版ステータス出版済み - 12 1 2002

All Science Journal Classification (ASJC) codes

  • 材料科学(全般)
  • 凝縮系物理学
  • 材料力学
  • 機械工学

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