Active control of the ablation plume for laser ablation atomic fluorescence spectroscopy

Daisuke Nakamura, Takayuki Takao, Yuji Oki, Mitsuo Maeda

研究成果: Chapter in Book/Report/Conference proceedingConference contribution

抄録

We have developed an extreme sensitive trace element detection technique that has been labeled Laser ablation atomic fluorescence (LAAF) spectroscopy, and applied to a nanometer-scale solid surface analysis. The absolute weight of the detection limit of 870 ag (10-18g) and high depth resolution of 3.6 nm had been demonstrated in trace sodium detection of polymethylmethacrylate. As a laser ablation was used in the LAAF spectroscopy, the behavior of the ablation plume is a very important factor for high sensitivity. So, we tried to control the plume by a buffer gas and an assist mask for more sensitive analysis. The diffusion velocity of the ablated particles was modified in collision with the gas molecules. Furthermore, it was found that the form of the plume was changed by the mask. Thus, improvement of the detection sensitivity of the LAAF is expected using this approach.

本文言語英語
ホスト出版物のタイトルPhoton Processing in Microelectronics and Photonics V
6106
DOI
出版ステータス出版済み - 5 22 2006
イベントPhoton Processing in Microelectronics and Photonics V - San Jose, CA, 米国
継続期間: 1 23 20061 26 2006

その他

その他Photon Processing in Microelectronics and Photonics V
国/地域米国
CitySan Jose, CA
Period1/23/061/26/06

All Science Journal Classification (ASJC) codes

  • 電子工学および電気工学
  • 凝縮系物理学

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