Adsorption Species of Transition Metal Ions on Silicon Wafer in SC-1 Solution

Yoshihiro Mori, Kenichi Uemura, Kengo Shimanoe

研究成果: Contribution to journalArticle査読

47 被引用数 (Scopus)

抄録

Adsorption of transition metal ions such as Fe(III), Ni(II), and Zn(II) on silicon wafers in ammoniac hydrogen peroxide solution (SC-1 solution) has been studied. It was found by comparing the experimental results with the equilibrium calculations that the main adsorption species is the dissolved neutral hydroxide complex. This was supported by the calculated free energy change of adsorption of hydroxide complexes.

本文言語英語
ページ(範囲)3104-3109
ページ数6
ジャーナルJournal of the Electrochemical Society
142
9
DOI
出版ステータス出版済み - 1995
外部発表はい

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Renewable Energy, Sustainability and the Environment
  • Surfaces, Coatings and Films
  • Electrochemistry
  • Materials Chemistry

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