TY - GEN
T1 - Al doping from laser irradiated Al film deposited on 4H-SiC
AU - Ikeda, Akihiro
AU - Sumina, Rikuho
AU - Ikenoue, Hiroshi
AU - Asano, Tanemasa
N1 - Publisher Copyright:
© 2016 Trans Tech Publications, Switzerland.
PY - 2016
Y1 - 2016
N2 - Al doping of 4H-SiC with high surface concentration and deep depth profile is found to be realized by irradiating single-pulse excimer laser to an Al film deposited on the surface. Optical emission spectra suggest that high-temperature molten Al is produced behind the laser-generated high-density Al plasma and Al is diffused from the molten Al into 4H-SiC. The Al doping depth reaches to ~200 nm by irradiating a single laser pulse. A pn junction diode fabricated by the doping with the molten Al shows on/off ratio over 10 orders of magnitude.
AB - Al doping of 4H-SiC with high surface concentration and deep depth profile is found to be realized by irradiating single-pulse excimer laser to an Al film deposited on the surface. Optical emission spectra suggest that high-temperature molten Al is produced behind the laser-generated high-density Al plasma and Al is diffused from the molten Al into 4H-SiC. The Al doping depth reaches to ~200 nm by irradiating a single laser pulse. A pn junction diode fabricated by the doping with the molten Al shows on/off ratio over 10 orders of magnitude.
UR - http://www.scopus.com/inward/record.url?scp=84971539163&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84971539163&partnerID=8YFLogxK
U2 - 10.4028/www.scientific.net/MSF.858.527
DO - 10.4028/www.scientific.net/MSF.858.527
M3 - Conference contribution
AN - SCOPUS:84971539163
SN - 9783035710427
T3 - Materials Science Forum
SP - 527
EP - 530
BT - Silicon Carbide and Related Materials 2015
A2 - Roccaforte, Fabrizio
A2 - Giannazzo, Filippo
A2 - La Via, Francesco
A2 - Nipoti, Roberta
A2 - Crippa, Danilo
A2 - Saggio, Mario
PB - Trans Tech Publications Ltd
T2 - 16th International Conference on Silicon Carbide and Related Materials, ICSCRM 2015
Y2 - 4 October 2015 through 9 October 2015
ER -