Analysis of cluster growth in magnetron-sputtering metal-cluster source by optical emission spectroscopy

研究成果: ジャーナルへの寄稿記事

抄録

We investigate cluster-growth processes in a magnetronsputtering cluster source by employing silver as a target metal. An optical emission spectrum of discharge plasma is measured along with a mass spectrum of silver cluster cations as a function of discharge power. The former quantifies the number of silver atoms sputtered, while the latter provides a size distribution of clusters produced. A scenario of cluster growth is discussed based on a simple statistical model.

元の言語英語
ページ(範囲)1537-1540
ページ数4
ジャーナルChemistry Letters
48
発行部数12
DOI
出版物ステータス出版済み - 1 1 2019

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Optical emission spectroscopy
Silver
Magnetron sputtering
Metals
Cations
Plasmas
Atoms

All Science Journal Classification (ASJC) codes

  • Chemistry(all)

これを引用

Analysis of cluster growth in magnetron-sputtering metal-cluster source by optical emission spectroscopy. / Kono, Satoshi; Arakawa, Masashi; Terasaki, Akira.

:: Chemistry Letters, 巻 48, 番号 12, 01.01.2019, p. 1537-1540.

研究成果: ジャーナルへの寄稿記事

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abstract = "We investigate cluster-growth processes in a magnetronsputtering cluster source by employing silver as a target metal. An optical emission spectrum of discharge plasma is measured along with a mass spectrum of silver cluster cations as a function of discharge power. The former quantifies the number of silver atoms sputtered, while the latter provides a size distribution of clusters produced. A scenario of cluster growth is discussed based on a simple statistical model.",
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