Analysis of ion implanted diamond-like-carbon films using laser-induced transient reflecting grating technique

Q. Shen, A. Harata, T. Sawada

研究成果: Contribution to journalConference article査読

抄録

Laser-induced transient reflecting grating (TRG) technique was applied to measure both nitrogen-ion-implanted and nonimplanted thin-film coatings (thickness, 40nm) of diamond-like-carbon (DLC). Different TRG responses corresponding to the different samples with a variety of nitrogen-ion implantation doses were observed and the hypersonic surface acoustic wave velocities were obtained with a variety of wavelengths. A phenomenon was observed that the SAW velocity of the implanted DLC coating with higher dose became larger than that of the nonimplanted sample.

本文言語英語
ページ(範囲)C7-233-236
ジャーナルJournal De Physique
4
7
DOI
出版ステータス出版済み - 1 1 1994
外部発表はい
イベントProceedings of the 8th International Topical Meeting on Photoacoustic and Photothermal Phenomena - Guadeloupe, Fr
継続期間: 1 22 19941 25 1994

All Science Journal Classification (ASJC) codes

  • 物理学および天文学(全般)

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