Analysis of ion implanted diamond-like-carbon films using laser-induced transient reflecting grating technique

Q. Shen, A. Harata, T. Sawada

研究成果: ジャーナルへの寄稿Conference article

抜粋

Laser-induced transient reflecting grating (TRG) technique was applied to measure both nitrogen-ion-implanted and nonimplanted thin-film coatings (thickness, 40nm) of diamond-like-carbon (DLC). Different TRG responses corresponding to the different samples with a variety of nitrogen-ion implantation doses were observed and the hypersonic surface acoustic wave velocities were obtained with a variety of wavelengths. A phenomenon was observed that the SAW velocity of the implanted DLC coating with higher dose became larger than that of the nonimplanted sample.

元の言語英語
ページ(範囲)C7-233-236
ジャーナルJournal De Physique
4
発行部数7
出版物ステータス出版済み - 7 1 1994
外部発表Yes
イベントProceedings of the 8th International Topical Meeting on Photoacoustic and Photothermal Phenomena - Guadeloupe, Fr
継続期間: 1 22 19941 25 1994

    フィンガープリント

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy(all)

これを引用