Analysis of the thermal and acoustic properties of ion-implanted diamondlike carbon films using the transient reflecting grating technique

Qing Shen, Akira Harata, Tsuguo Sawada

研究成果: Contribution to journalArticle査読

19 被引用数 (Scopus)

抄録

The transient reflecting grating (TRG) technique was applied to evaluate both nitrogen-ion-implanted and nonimplanted thin-film coatings (thickness: 40 nm) of diamondlike carbon (DLC) on metallic multilayered substrates. Different TRG responses corresponding to the different nitrogen ion doses were observed. Hypersonic surface wave velocities as well as the thermal diffusivities were obtained with a variety of grating spacings. Effective elastic moduli (Young's moduli) for the DLC coatings were given by using a theoretical treatment with a model. Nitrogen ion implantation hardened the DLC coating.

本文言語英語
ページ(範囲)1488-1491
ページ数4
ジャーナルJournal of Applied Physics
77
4
DOI
出版ステータス出版済み - 1995
外部発表はい

All Science Journal Classification (ASJC) codes

  • 物理学および天文学(全般)

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