Analytical calculation for estimation of magnetic film properties for a 3-GHz thin film inductor

Terumitsu Tanaka, Yang Ki Hong, Sung Hoon Gee, Mun Hyoun Park, Dustin W. Erickson, Chongwor Byun

研究成果: Contribution to journalArticle査読

6 被引用数 (Scopus)

抄録

Thickness, resistivity, and the Gilbert damping constant are estimated using Maxwell and Landau-Lifshitz-Gilbert (LLG) equations to meet operating parameters of ferromagnetic thin film inductors in the gigahertz frequency range. The following properties of soft magnetic film are calculated to satisfy a quality factor of 10 at 3 GHz: 4πMS = 21.3 kG: Hk - 215 Oe; and μ′dc = 100. The complex permeability was not influenced by film thickness up to 100 nm. Operation frequency increases with the increase of electrical resistivity and decrease of film thickness. The Gilbert damping constant is found to have a significant effect on the operation frequency. The quality factor can be retained up to 3 GHz for 100-nm-thick film with a damping constant of 0.015 when resistivity is greater than 50 μΩ · cm.

本文言語英語
ページ(範囲)2005-2007
ページ数3
ジャーナルIEEE Transactions on Magnetics
40
4 II
DOI
出版ステータス出版済み - 7 2004
外部発表はい

All Science Journal Classification (ASJC) codes

  • 電子材料、光学材料、および磁性材料
  • 電子工学および電気工学

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