Applicability of the differential X-ray absorption method to the determinations of foil thickness and local composition in the analytical electron microscope

Z. Horita, K. Ichitani, T. Sano, M. Nemoto

    研究成果: Contribution to journalArticle査読

    37 被引用数 (Scopus)

    抄録

    In this paper, we examine the applicability of the differential X-ray absorption (DXA) method of Morris, Ball and Statham which is capable of determining foil thickness and local composition concurrently in an analytical electron microscope. The method is first modified to take a general form where the thickness determination is achieved with a pair of characteristic lines from different elements. When this form is used, the pair is not necessarily limited from the same elements. It is shown then that there are four important factors affecting the precision and accuracy of the foil thickness. A comparison is carried out between the thicknesses determined with the DXA method and those measured with the convergent-beam electron diffraction method. The composition analysed with the DXA method is also compared with the nominal composition of the sample.

    本文言語英語
    ページ(範囲)939-952
    ページ数14
    ジャーナルPhilosophical Magazine A: Physics of Condensed Matter, Structure, Defects and Mechanical Properties
    59
    5
    DOI
    出版ステータス出版済み - 5 1989

    All Science Journal Classification (ASJC) codes

    • 電子材料、光学材料、および磁性材料
    • 材料科学(全般)
    • 凝縮系物理学
    • 物理学および天文学(その他)
    • 金属および合金

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