The atom probe-field ion microscope (N-FIM) facilitates observation of atomic arrangement in the specimen surface with high resolution and identification of species of individual atoms by high-sensitivity mass spectroscopy. The AP-FIM produced detailed knowledge on such small specimen regions that could not be clearly analyzed by conventional electron microscopy. The principle of the AP-FIM is explained, and the results of AP-FIM analysis of ultra-fine precipitates formed at the peak stage of secondary hardening in a tempered Mo steel is briefly described.
|ジャーナル||Nippon Steel Technical Report|
|出版ステータス||出版済み - 4月 1 1987|
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