Application of mems technique for micro gear metrology

Syuhei Kurokawa, Yoji Umezaki, Morihisa Hoga, Ryohei Ishimaru, Osamu Ohnishi, Toshiro Doi

研究成果: Chapter in Book/Report/Conference proceedingConference contribution

抄録

We try to measure direct transmission of rotational motion between a gear pair, which is called transmission error, without knowing the tooth flank accuracy of each gear. In transmission error measurement, the rotational angle of the shaft of each gear is measured with a pair of rotary encoders. For micro gear engagement, the center distance between a pair of gears is very small, so the rotary encoders have to be small as well as micro gears. A grating disk with a small diameter for a micro rotary encoder must be designed and manufactured. In machining process, one of the MEMS technique is applied. Patterning accuracy is examined in detail.

本文言語英語
ホスト出版物のタイトルPower Transmissions - Proceedings of the 4th International Conference
編集者George Dobre
出版社Springer Netherlands
ページ457-466
ページ数10
ISBN(印刷版)9789400765573
DOI
出版ステータス出版済み - 1 1 2013
イベント4th International Conference on Power Transmissions, PT 2012 - Sinaia
継続期間: 6 20 20126 23 2012

出版物シリーズ

名前Mechanisms and Machine Science
13
ISSN(印刷版)2211-0984
ISSN(電子版)2211-0992

その他

その他4th International Conference on Power Transmissions, PT 2012
CitySinaia
Period6/20/126/23/12

All Science Journal Classification (ASJC) codes

  • Mechanics of Materials
  • Mechanical Engineering

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