Application of mems technique for micro gear metrology

Syuhei Kurokawa, Yoji Umezaki, Morihisa Hoga, Ryohei Ishimaru, Osamu Ohnishi, Toshiro Doi

研究成果: 著書/レポートタイプへの貢献会議での発言

抄録

We try to measure direct transmission of rotational motion between a gear pair, which is called transmission error, without knowing the tooth flank accuracy of each gear. In transmission error measurement, the rotational angle of the shaft of each gear is measured with a pair of rotary encoders. For micro gear engagement, the center distance between a pair of gears is very small, so the rotary encoders have to be small as well as micro gears. A grating disk with a small diameter for a micro rotary encoder must be designed and manufactured. In machining process, one of the MEMS technique is applied. Patterning accuracy is examined in detail.

元の言語英語
ホスト出版物のタイトルPower Transmissions - Proceedings of the 4th International Conference
編集者George Dobre
出版者Springer Netherlands
ページ457-466
ページ数10
ISBN(印刷物)9789400765573
DOI
出版物ステータス出版済み - 1 1 2013
イベント4th International Conference on Power Transmissions, PT 2012 - Sinaia
継続期間: 6 20 20126 23 2012

出版物シリーズ

名前Mechanisms and Machine Science
13
ISSN(印刷物)2211-0984
ISSN(電子版)2211-0992

その他

その他4th International Conference on Power Transmissions, PT 2012
Sinaia
期間6/20/126/23/12

Fingerprint

Gears
Gear teeth
Measurement errors
MEMS
Machining

All Science Journal Classification (ASJC) codes

  • Mechanics of Materials
  • Mechanical Engineering

これを引用

Kurokawa, S., Umezaki, Y., Hoga, M., Ishimaru, R., Ohnishi, O., & Doi, T. (2013). Application of mems technique for micro gear metrology. : G. Dobre (版), Power Transmissions - Proceedings of the 4th International Conference (pp. 457-466). (Mechanisms and Machine Science; 巻数 13). Springer Netherlands. https://doi.org/10.1007/978-94-007-6558-0_36

Application of mems technique for micro gear metrology. / Kurokawa, Syuhei; Umezaki, Yoji; Hoga, Morihisa; Ishimaru, Ryohei; Ohnishi, Osamu; Doi, Toshiro.

Power Transmissions - Proceedings of the 4th International Conference. 版 / George Dobre. Springer Netherlands, 2013. p. 457-466 (Mechanisms and Machine Science; 巻 13).

研究成果: 著書/レポートタイプへの貢献会議での発言

Kurokawa, S, Umezaki, Y, Hoga, M, Ishimaru, R, Ohnishi, O & Doi, T 2013, Application of mems technique for micro gear metrology. : G Dobre (版), Power Transmissions - Proceedings of the 4th International Conference. Mechanisms and Machine Science, 巻. 13, Springer Netherlands, pp. 457-466, 4th International Conference on Power Transmissions, PT 2012, Sinaia, 6/20/12. https://doi.org/10.1007/978-94-007-6558-0_36
Kurokawa S, Umezaki Y, Hoga M, Ishimaru R, Ohnishi O, Doi T. Application of mems technique for micro gear metrology. : Dobre G, 編集者, Power Transmissions - Proceedings of the 4th International Conference. Springer Netherlands. 2013. p. 457-466. (Mechanisms and Machine Science). https://doi.org/10.1007/978-94-007-6558-0_36
Kurokawa, Syuhei ; Umezaki, Yoji ; Hoga, Morihisa ; Ishimaru, Ryohei ; Ohnishi, Osamu ; Doi, Toshiro. / Application of mems technique for micro gear metrology. Power Transmissions - Proceedings of the 4th International Conference. 編集者 / George Dobre. Springer Netherlands, 2013. pp. 457-466 (Mechanisms and Machine Science).
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