Application of nano-imprint technology to grating scale for a rotary microencoder

Toshihiro Takeshita, Takuma Iwasaki, Eiji Higurashi, Tatsuya Miyazaki, Renshi Sawada

    研究成果: Chapter in Book/Report/Conference proceedingConference contribution

    抄録

    Using nano-imprint technology we have developed a rotary diffraction grating scale, which is used for micro rotary encoding. The off-center error between the center of the trough-hole for a rotational axis and the center of the high-precision micro-pattern on the periphery of the scale is less than 3 μm because we are able to shape the through-hole and the grating pattern simultaneously. The use of nano-imprinting is epoch-making, in view of the traditionally poor centering precision of grating scale through-holes fabricated using the conventional photolithography coupled with machining of the through-hole.

    本文言語英語
    ホスト出版物のタイトルOptical MEMS and Nanophotonics 2013, OMN 2013 - Proceedings
    ページ117-118
    ページ数2
    DOI
    出版ステータス出版済み - 12 1 2013
    イベント2013 International Conference on Optical MEMS and Nanophotonics, OMN 2013 - Kanazawa, 日本
    継続期間: 8 18 20138 22 2013

    出版物シリーズ

    名前International Conference on Optical MEMS and Nanophotonics
    ISSN(印刷版)2160-5033
    ISSN(電子版)2160-5041

    その他

    その他2013 International Conference on Optical MEMS and Nanophotonics, OMN 2013
    国/地域日本
    CityKanazawa
    Period8/18/138/22/13

    All Science Journal Classification (ASJC) codes

    • ハードウェアとアーキテクチャ
    • 電子工学および電気工学
    • 電子材料、光学材料、および磁性材料

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