Application of nanoimprint technology to diffraction grating scale for microrotary encoder

Toshihiro Takeshita, Takuma Iwasaki, Eiji Higurashi, Renshi Sawada

    研究成果: Contribution to journalArticle査読

    7 被引用数 (Scopus)

    抄録

    Using nanoimprint technology, we developed a rotary diffraction grating scale, which is used for microrotary encoding. The off-center error between the center of the throughhole for inserting a rotational axis and the center of the high-precision micropattern on the periphery of the scale is less than 3 μm because we are able to shape the through-hole and the grating pattern simultaneously. The rotary grating is of sufficient accuracy to use as the scale in a microrotary encoder. The use of nanoimprinting is groundbreaking, in view of the traditionally poor centering precision of grating scale through-holes fabricated by conventional photolithography coupled with the machining of throughholes.

    本文言語英語
    ページ(範囲)609-618
    ページ数10
    ジャーナルSensors and Materials
    25
    9
    出版ステータス出版済み - 12 1 2013

    All Science Journal Classification (ASJC) codes

    • 器械工学
    • 材料科学(全般)

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