### 抄録

(1) From the standpoint of the potential energy, the one-bond-type migration is divided into the BC (bond-centered type) and SP (split 〈1 0 0〉 type) migrations. In the BC migration, there are two kinds of atom migrations. One is that in which a BC atom pushes its neighboring atom to a BC site. This is the typical migration by the interstitialcy mechanism. The other is that in which a BC atom rotates about its neighboring atom and becomes the BC atom again. This is a feature of the BC migration. (2) The BC and SP migrations are applied to P diffusion in Si. Assuming there is no interaction between P and Si, the distance and probability for each step of the migration are obtained and applied to Si self-diffusion. Because they are not constant, the definition of the correlation factor for the self-diffusion is different from the usual one.

元の言語 | 英語 |
---|---|

ページ（範囲） | 128-131 |

ページ数 | 4 |

ジャーナル | Journal of Crystal Growth |

巻 | 210 |

発行部数 | 1 |

DOI | |

出版物ステータス | 出版済み - 3 1 2000 |

イベント | 8th International Conference on Defects-Recognition, Imaging and Physics in Semiconductors - Narita, Jpn 継続期間: 9 15 1999 → 9 18 1999 |

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### All Science Journal Classification (ASJC) codes

- Condensed Matter Physics
- Inorganic Chemistry
- Materials Chemistry

### これを引用

*Journal of Crystal Growth*,

*210*(1), 128-131. https://doi.org/10.1016/S0022-0248(99)00665-X

**Application of one-bond-type migration to interstitialcy-type self-interstitial and phosphorus in silicon.** / Yoshida, Masayuki; Kamiura, Yoichi; Tsuruno, Reiji; Takahashi, Manabu; Tomokage, Hajime.

研究成果: ジャーナルへの寄稿 › Conference article

*Journal of Crystal Growth*, 巻. 210, 番号 1, pp. 128-131. https://doi.org/10.1016/S0022-0248(99)00665-X

}

TY - JOUR

T1 - Application of one-bond-type migration to interstitialcy-type self-interstitial and phosphorus in silicon

AU - Yoshida, Masayuki

AU - Kamiura, Yoichi

AU - Tsuruno, Reiji

AU - Takahashi, Manabu

AU - Tomokage, Hajime

PY - 2000/3/1

Y1 - 2000/3/1

N2 - (1) From the standpoint of the potential energy, the one-bond-type migration is divided into the BC (bond-centered type) and SP (split 〈1 0 0〉 type) migrations. In the BC migration, there are two kinds of atom migrations. One is that in which a BC atom pushes its neighboring atom to a BC site. This is the typical migration by the interstitialcy mechanism. The other is that in which a BC atom rotates about its neighboring atom and becomes the BC atom again. This is a feature of the BC migration. (2) The BC and SP migrations are applied to P diffusion in Si. Assuming there is no interaction between P and Si, the distance and probability for each step of the migration are obtained and applied to Si self-diffusion. Because they are not constant, the definition of the correlation factor for the self-diffusion is different from the usual one.

AB - (1) From the standpoint of the potential energy, the one-bond-type migration is divided into the BC (bond-centered type) and SP (split 〈1 0 0〉 type) migrations. In the BC migration, there are two kinds of atom migrations. One is that in which a BC atom pushes its neighboring atom to a BC site. This is the typical migration by the interstitialcy mechanism. The other is that in which a BC atom rotates about its neighboring atom and becomes the BC atom again. This is a feature of the BC migration. (2) The BC and SP migrations are applied to P diffusion in Si. Assuming there is no interaction between P and Si, the distance and probability for each step of the migration are obtained and applied to Si self-diffusion. Because they are not constant, the definition of the correlation factor for the self-diffusion is different from the usual one.

UR - http://www.scopus.com/inward/record.url?scp=0033893283&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0033893283&partnerID=8YFLogxK

U2 - 10.1016/S0022-0248(99)00665-X

DO - 10.1016/S0022-0248(99)00665-X

M3 - Conference article

AN - SCOPUS:0033893283

VL - 210

SP - 128

EP - 131

JO - Journal of Crystal Growth

JF - Journal of Crystal Growth

SN - 0022-0248

IS - 1

ER -