Application of the dielectric barrier discharge to detect defects in a teflon coated metal surface

Kenji Ebihara, Takahiro Tanaka, Tomoaki Ikegami, Yukihiko Yamagata, Toru Matsunaga, Kazutaka Yamashita, Yoshifumi Oyama

研究成果: ジャーナルへの寄稿学術誌査読

3 被引用数 (Scopus)


In the semiconductor industry, flexible stainless steel tubes, the inside of which are coated with thick Teflon films, by the splay coating method, have been used to prevent their degradation and erosion by organic solvents. We have developed an inspection system to detect pinholes and cracks in the deposited Teflon films, and the dielectric barrier discharge (DBD) was employed to reduce residual substances and damages to the coated film in the tube. Conducting water contained in the cylinder-like glass pipe was used as a liquid electrode to apply a high voltage at any portion of the tube tested. A defective part with a pinhole was modelled by a point electrode in this experiment, because the uncoated defective part has a lower electric breakdown voltage. High frequency voltage (10 kHz) was applied between the point electrode and the liquid electrode. The level of the liquid electrode was varied to detect the occurrence of a microdischarge. It is found that the number of current pulses due to the microdischarge can be used to estimate the size and location of the defective uncoated point of the sample tube.

ジャーナルJournal of Physics D: Applied Physics
出版ステータス出版済み - 12月 7 2003

!!!All Science Journal Classification (ASJC) codes

  • 電子材料、光学材料、および磁性材料
  • 凝縮系物理学
  • 音響学および超音波学
  • 表面、皮膜および薄膜


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