Applications of nano hot-film sensor for micro/nanoscale thermal measurement

Koji Takahashi, Jun Hirotani, Takashi Nishiyama, Tatsuya Ikuta, Hiroshi Takamatsu

研究成果: 著書/レポートタイプへの貢献会議での発言

抄録

Platinum hot-film sensors, whose typical size is 500nm wide x 10μm long x 40nm thick, are developed for investigating micro and nanoscale thermal events. This paper reports four kinds of applications with measurement principle, sensitivity analysis, and test results. Thermal conductivity of individual nanowire, represented by carbon nanotube, has been measured by bridging the specimen between the sensor and a heat sink. Here a new device is newly developed, which enables us to measure quantitatively both intrinsic thermal conductivity of the specimen and thermal contact resistance between the specimen and a target material. Focused beam-induced deposition is also measured by comparing the thermal conductance of deposited sensor and pristine one. Flow sensor is another application and we investigate the performance of carbon nanotube (CNT) fins deposited on the sensor by using dielectrophoresis technique to enhance the flow signal. The applicability of this sensor for measuring the thermal conductivity of fluid of very limited volume (femto-liter order) is also analytically studied.

元の言語英語
ホスト出版物のタイトルASME 2012 3rd International Conference on Micro/Nanoscale Heat and Mass Transfer, MNHMT 2012
ページ677-681
ページ数5
DOI
出版物ステータス出版済み - 12 1 2012
イベントASME 2012 3rd International Conference on Micro/Nanoscale Heat and Mass Transfer, MNHMT 2012 - Atlanta, GA, 米国
継続期間: 3 3 20123 6 2012

その他

その他ASME 2012 3rd International Conference on Micro/Nanoscale Heat and Mass Transfer, MNHMT 2012
米国
Atlanta, GA
期間3/3/123/6/12

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Sensors
Thermal conductivity
Carbon Nanotubes
Carbon nanotubes
Heat sinks
Contact resistance
Platinum
Electrophoresis
Sensitivity analysis
Nanowires
Hot Temperature
Fluids

All Science Journal Classification (ASJC) codes

  • Fluid Flow and Transfer Processes

これを引用

Takahashi, K., Hirotani, J., Nishiyama, T., Ikuta, T., & Takamatsu, H. (2012). Applications of nano hot-film sensor for micro/nanoscale thermal measurement. : ASME 2012 3rd International Conference on Micro/Nanoscale Heat and Mass Transfer, MNHMT 2012 (pp. 677-681) https://doi.org/10.1115/MNHMT2012-75030

Applications of nano hot-film sensor for micro/nanoscale thermal measurement. / Takahashi, Koji; Hirotani, Jun; Nishiyama, Takashi; Ikuta, Tatsuya; Takamatsu, Hiroshi.

ASME 2012 3rd International Conference on Micro/Nanoscale Heat and Mass Transfer, MNHMT 2012. 2012. p. 677-681.

研究成果: 著書/レポートタイプへの貢献会議での発言

Takahashi, K, Hirotani, J, Nishiyama, T, Ikuta, T & Takamatsu, H 2012, Applications of nano hot-film sensor for micro/nanoscale thermal measurement. : ASME 2012 3rd International Conference on Micro/Nanoscale Heat and Mass Transfer, MNHMT 2012. pp. 677-681, ASME 2012 3rd International Conference on Micro/Nanoscale Heat and Mass Transfer, MNHMT 2012, Atlanta, GA, 米国, 3/3/12. https://doi.org/10.1115/MNHMT2012-75030
Takahashi K, Hirotani J, Nishiyama T, Ikuta T, Takamatsu H. Applications of nano hot-film sensor for micro/nanoscale thermal measurement. : ASME 2012 3rd International Conference on Micro/Nanoscale Heat and Mass Transfer, MNHMT 2012. 2012. p. 677-681 https://doi.org/10.1115/MNHMT2012-75030
Takahashi, Koji ; Hirotani, Jun ; Nishiyama, Takashi ; Ikuta, Tatsuya ; Takamatsu, Hiroshi. / Applications of nano hot-film sensor for micro/nanoscale thermal measurement. ASME 2012 3rd International Conference on Micro/Nanoscale Heat and Mass Transfer, MNHMT 2012. 2012. pp. 677-681
@inproceedings{eb0967114b7e41de8a0e8083aa912fe4,
title = "Applications of nano hot-film sensor for micro/nanoscale thermal measurement",
abstract = "Platinum hot-film sensors, whose typical size is 500nm wide x 10μm long x 40nm thick, are developed for investigating micro and nanoscale thermal events. This paper reports four kinds of applications with measurement principle, sensitivity analysis, and test results. Thermal conductivity of individual nanowire, represented by carbon nanotube, has been measured by bridging the specimen between the sensor and a heat sink. Here a new device is newly developed, which enables us to measure quantitatively both intrinsic thermal conductivity of the specimen and thermal contact resistance between the specimen and a target material. Focused beam-induced deposition is also measured by comparing the thermal conductance of deposited sensor and pristine one. Flow sensor is another application and we investigate the performance of carbon nanotube (CNT) fins deposited on the sensor by using dielectrophoresis technique to enhance the flow signal. The applicability of this sensor for measuring the thermal conductivity of fluid of very limited volume (femto-liter order) is also analytically studied.",
author = "Koji Takahashi and Jun Hirotani and Takashi Nishiyama and Tatsuya Ikuta and Hiroshi Takamatsu",
year = "2012",
month = "12",
day = "1",
doi = "10.1115/MNHMT2012-75030",
language = "English",
isbn = "9780791854778",
pages = "677--681",
booktitle = "ASME 2012 3rd International Conference on Micro/Nanoscale Heat and Mass Transfer, MNHMT 2012",

}

TY - GEN

T1 - Applications of nano hot-film sensor for micro/nanoscale thermal measurement

AU - Takahashi, Koji

AU - Hirotani, Jun

AU - Nishiyama, Takashi

AU - Ikuta, Tatsuya

AU - Takamatsu, Hiroshi

PY - 2012/12/1

Y1 - 2012/12/1

N2 - Platinum hot-film sensors, whose typical size is 500nm wide x 10μm long x 40nm thick, are developed for investigating micro and nanoscale thermal events. This paper reports four kinds of applications with measurement principle, sensitivity analysis, and test results. Thermal conductivity of individual nanowire, represented by carbon nanotube, has been measured by bridging the specimen between the sensor and a heat sink. Here a new device is newly developed, which enables us to measure quantitatively both intrinsic thermal conductivity of the specimen and thermal contact resistance between the specimen and a target material. Focused beam-induced deposition is also measured by comparing the thermal conductance of deposited sensor and pristine one. Flow sensor is another application and we investigate the performance of carbon nanotube (CNT) fins deposited on the sensor by using dielectrophoresis technique to enhance the flow signal. The applicability of this sensor for measuring the thermal conductivity of fluid of very limited volume (femto-liter order) is also analytically studied.

AB - Platinum hot-film sensors, whose typical size is 500nm wide x 10μm long x 40nm thick, are developed for investigating micro and nanoscale thermal events. This paper reports four kinds of applications with measurement principle, sensitivity analysis, and test results. Thermal conductivity of individual nanowire, represented by carbon nanotube, has been measured by bridging the specimen between the sensor and a heat sink. Here a new device is newly developed, which enables us to measure quantitatively both intrinsic thermal conductivity of the specimen and thermal contact resistance between the specimen and a target material. Focused beam-induced deposition is also measured by comparing the thermal conductance of deposited sensor and pristine one. Flow sensor is another application and we investigate the performance of carbon nanotube (CNT) fins deposited on the sensor by using dielectrophoresis technique to enhance the flow signal. The applicability of this sensor for measuring the thermal conductivity of fluid of very limited volume (femto-liter order) is also analytically studied.

UR - http://www.scopus.com/inward/record.url?scp=84882292247&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84882292247&partnerID=8YFLogxK

U2 - 10.1115/MNHMT2012-75030

DO - 10.1115/MNHMT2012-75030

M3 - Conference contribution

AN - SCOPUS:84882292247

SN - 9780791854778

SP - 677

EP - 681

BT - ASME 2012 3rd International Conference on Micro/Nanoscale Heat and Mass Transfer, MNHMT 2012

ER -