Atom-migration effect during crystallization of a-SiGe films by SR soft x-ray irradiation

Shota Kino, Yuki Nonomura, Akira Heya, Naoto Matsuo, Kazuhiro Kanda, Shuji Miyamoto, Sho Amano, Takayasu Mochizuki, Kaoru Toko, Taizoh Sadoh, Masanobu Miyao

研究成果: Chapter in Book/Report/Conference proceedingConference contribution

2 被引用数 (Scopus)

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Engineering & Materials Science

Medicine & Life Sciences

Chemical Compounds