Basic studies on tungsten-CMP slurry recycle

Engineering

• Tungsten 66%
• Chemical Mechanical Polishing 55%
• Water 33%
• High Cost 22%
• Processing Characteristic 22%
• Filters 11%
• Performance 11%
• Research 11%
• Environment 11%
• Reuse 11%
• Heavy Load 11%
• Electronic Devices 11%
• Polishing Process 11%
• Polishing Slurry 11%
• Ion Exchange 11%

Material Science

• Slurry 100%
• Metal 33%
• Ceramics 11%