Measurement of blood flow is very important since it carries oxygen, nutrients, heat and information on body condition to the tissues in every corner of the body. However, their use in practice remains uncommon. This is because contact pressure has not been considered while measuring blood flow, despite the fact that blood flow is greatly affected by it. The contact pressure between the skin and the sensor is required to be measured simultaneously and at the same position with blood flow, to make the reproducibility and reliability of the measurement higher. We have developed highly reliable and highly reproducible micro blood flow sensor with a built-in contact pressure sensor and temperature sensor by adding a temperature sensor at the same position also considering the temperature highly influential in blood flow.