@inproceedings{c7740049176d4b2795e7964dba9a7a3c,
title = "Bragg grating coupled high Q factor ring resonator using LSCVD deposited Si3N4 film",
abstract = "High-quality Si3N4 films with low optical loss were deposited at 150°C using LSCVD. A micro-ring resonator based on as-deposited Si3N4 with Q-factor of 5.2×104 has been demonstrated. Bragg gratings are fabricated at bus ends to improve coupling efficiency. The LSCVD deposited Si3N4 exemplify its viability as a photonic integration platform.",
author = "Xiaoyang Cheng and Shiyoshi Yokoyama",
year = "2017",
month = nov,
day = "19",
doi = "10.23919/MOC.2017.8244509",
language = "English",
series = "22nd Microoptics Conference, MOC 2017",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "96--97",
booktitle = "22nd Microoptics Conference, MOC 2017",
address = "United States",
note = "22nd Microoptics Conference, MOC 2017 ; Conference date: 19-11-2017 Through 22-11-2017",
}