In order to measure the 3D shape of microcomponents, a novel nano-CMM system has been developed based on an oscillated probing technique, which uses an optically trapped particle. The trapped particle is laterally oscillated at the focal plane of the objective. The frequency response of the oscillated particle typically agrees with the spring-mass-damper model. However the response disagrees with the theoretical curve of the conventional model equation in the range of high frequency. It is considered the difference between experiments and the model equation is caused from the numerical error for the fluid effect, which is applied on condition of creeping flow past a sphere. In this report, we construct a fluid simulation using SMAC method that calculates fluid resistance against an oscillating sphere in noninertial frame of reference. The fluid resistance damp the motion of an oscillating sphere pulled toward focal spot and spring-mass-damper system can be processed with the use of simulation.
|ジャーナル||Nihon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C|
|出版ステータス||出版済み - 9 2009|
All Science Journal Classification (ASJC) codes
- Mechanics of Materials
- Mechanical Engineering
- Industrial and Manufacturing Engineering