Capacitive-type gas sensors combining silicon semiconductor and NaNO 2-based solid electrolyte for NO2 detection

Cyrus Zamani, Kengo Shimanoe, Noboru Yamazoe

研究成果: ジャーナルへの寄稿記事

11 引用 (Scopus)

抄録

A capacitive-type NO2 gas sensor, developed by replacing metal in metal-insulator-semiconductor structure with solid electrolyte as sensing material, was investigated to improve the response and recovery rates and the operating temperature by modifying NaNO2-sensing material. Binary sensing materials of NaNO2-Ca3(PO4)2 and NaNO2-WO3 were tested for auxiliary phase of the device. The Ca3(PO4)2-containing phase showed a response closer to ideal Nernstian behavior at 140 °C as compared to WO3-containing phase. On the other hand, the WO3- containing phase showed faster response and recovery rates at 160 °C, while the response deviated from Nernstian correlation. In order to obtain optimum sensor response, a ternary phase of NaNO2-Ca3(PO 4)2-WO3 was used as sensing phase. The device with ternary auxiliary phase was found to show more stable and faster response and recovery rates at 130 °C, as compared to previous devices attached with binary phases, corresponding Nernstian correlation in the concentration range of 20-500 ppb NO2. Furthermore, the effects of modification process on the auxiliary phase were investigated through SEM observation of the surface structures and measurement of ionic conductivity.

元の言語英語
ページ(範囲)300-306
ページ数7
ジャーナルSensors and Actuators, B: Chemical
109
発行部数2
DOI
出版物ステータス出版済み - 9 14 2005

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Solid electrolytes
solid electrolytes
Silicon
Chemical sensors
Semiconductor materials
Recovery
sensors
silicon
Metals
gases
recovery
Surface measurement
Ionic conductivity
Surface structure
Scanning electron microscopy
Sensors
MIS (semiconductors)
operating temperature
ion currents
Temperature

All Science Journal Classification (ASJC) codes

  • Analytical Chemistry
  • Electrochemistry
  • Electrical and Electronic Engineering

これを引用

Capacitive-type gas sensors combining silicon semiconductor and NaNO 2-based solid electrolyte for NO2 detection. / Zamani, Cyrus; Shimanoe, Kengo; Yamazoe, Noboru.

:: Sensors and Actuators, B: Chemical, 巻 109, 番号 2, 14.09.2005, p. 300-306.

研究成果: ジャーナルへの寄稿記事

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