TY - JOUR
T1 - Capacitor applications of c-axis-oriented bismuth layer structured ferroelectric thin films
AU - Kojima, Takashi
AU - Watanabe, Takayuki
AU - Funakubo, Hiroshi
AU - Sakashita, Yukio
AU - Oikawa, Takahiro
PY - 2003/12/8
Y1 - 2003/12/8
N2 - C-axis-oriented epitaxial and preferred-oriented Bi4Ti 3O12(BIT) films were deposited on (100)SrRuO 3//(100)SrTiO3 and (111)Pt/Ti/SiO2/Si substrates by metalorganic chemical vapor deposition. Preferred-oriented films were deposited at 500°C by the sequential introduction of Bi and Ti sources followed by the crystal structure of BIT along c-axis, while the epitaxial films were deposited at 640°C. For the epitaxial films, the relative dielectric constant was almost constant with decreasing the film thickness down to 18 nm and the increase of the electric field of 100 kV/cm. The data of single-axis-oriented film was almost equal to those of epitaxial one. This suggests that not only the epitaxial films but also the single-axis-oriented ones are useful candidates for capacitor applications.
AB - C-axis-oriented epitaxial and preferred-oriented Bi4Ti 3O12(BIT) films were deposited on (100)SrRuO 3//(100)SrTiO3 and (111)Pt/Ti/SiO2/Si substrates by metalorganic chemical vapor deposition. Preferred-oriented films were deposited at 500°C by the sequential introduction of Bi and Ti sources followed by the crystal structure of BIT along c-axis, while the epitaxial films were deposited at 640°C. For the epitaxial films, the relative dielectric constant was almost constant with decreasing the film thickness down to 18 nm and the increase of the electric field of 100 kV/cm. The data of single-axis-oriented film was almost equal to those of epitaxial one. This suggests that not only the epitaxial films but also the single-axis-oriented ones are useful candidates for capacitor applications.
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M3 - Conference article
AN - SCOPUS:0344064785
VL - 24
SP - 57
EP - 64
JO - Ceramic Engineering and Science Proceedings
JF - Ceramic Engineering and Science Proceedings
SN - 0196-6219
IS - 4
T2 - 27th International Cocoa Beach Conference on Advanced Ceramics and Composites: B
Y2 - 26 January 2003 through 31 January 2003
ER -