TY - JOUR
T1 - Carbon nanotube thermal probe for quantitative temperature sensing
AU - Hirotani, Jun
AU - Amano, Juo
AU - Ikuta, Tatsuya
AU - Nishiyama, Takashi
AU - Takahashi, Koji
N1 - Funding Information:
This work was partially supported by Grants-in-Aid for Scientific Research ( 23360101 , 23656153 , 23760191 , 24560237 ) and a Grant-in-Aid for JSPS Fellows ( 231457 ). Sensor fabrication was partially conducted at the Collabo-Station II of Kyushu University. The HRTEM and AFM observations were conducted in the Research Laboratory for High Voltage Electron Microscopy and in the Center of Advanced Instrumental Analysis, Kyushu University, respectively.
Copyright:
Copyright 2013 Elsevier B.V., All rights reserved.
PY - 2013
Y1 - 2013
N2 - Quantitative temperature sensing at the nanoscale point contact is developed using a platinum hot film sensor with a carbon nanotube (CNT) as a thermal probe. High spatial resolution and robustness is achieved because of the small tip radius and high stiffness of the CNT. The quantitative local temperature at the CNT probe contact point is determined by bringing the probe in and out of contact and controlling the amount of heat of the Pt hot film in high vacuum environment. Using this method, we overcome the problems of thermal contact resistance (TCR) between the CNT and sample surface. Sensor sensitivity for TCR and thermal conductivity measurement of a CNT is analyzed and the sensor configuration is optimized.
AB - Quantitative temperature sensing at the nanoscale point contact is developed using a platinum hot film sensor with a carbon nanotube (CNT) as a thermal probe. High spatial resolution and robustness is achieved because of the small tip radius and high stiffness of the CNT. The quantitative local temperature at the CNT probe contact point is determined by bringing the probe in and out of contact and controlling the amount of heat of the Pt hot film in high vacuum environment. Using this method, we overcome the problems of thermal contact resistance (TCR) between the CNT and sample surface. Sensor sensitivity for TCR and thermal conductivity measurement of a CNT is analyzed and the sensor configuration is optimized.
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U2 - 10.1016/j.sna.2013.04.038
DO - 10.1016/j.sna.2013.04.038
M3 - Article
AN - SCOPUS:84878627227
VL - 199
SP - 1
EP - 8
JO - Sensors and Actuators A: Physical
JF - Sensors and Actuators A: Physical
SN - 0924-4247
ER -