Carbon nanotube thermal probe for quantitative temperature sensing

Jun Hirotani, Juo Amano, Tatsuya Ikuta, Takashi Nishiyama, Koji Takahashi

研究成果: Contribution to journalArticle査読

15 被引用数 (Scopus)

抄録

Quantitative temperature sensing at the nanoscale point contact is developed using a platinum hot film sensor with a carbon nanotube (CNT) as a thermal probe. High spatial resolution and robustness is achieved because of the small tip radius and high stiffness of the CNT. The quantitative local temperature at the CNT probe contact point is determined by bringing the probe in and out of contact and controlling the amount of heat of the Pt hot film in high vacuum environment. Using this method, we overcome the problems of thermal contact resistance (TCR) between the CNT and sample surface. Sensor sensitivity for TCR and thermal conductivity measurement of a CNT is analyzed and the sensor configuration is optimized.

本文言語英語
ページ(範囲)1-8
ページ数8
ジャーナルSensors and Actuators, A: Physical
199
DOI
出版ステータス出版済み - 2013

All Science Journal Classification (ASJC) codes

  • 電子材料、光学材料、および磁性材料
  • 器械工学
  • 凝縮系物理学
  • 表面、皮膜および薄膜
  • 金属および合金
  • 電子工学および電気工学

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