Carbon nanotube thermal probe using platinum nano hot-film

Koji Takahashi, Jun Hirotani, Satoshi Kai, Tatsuya Ikuta

研究成果: 著書/レポートタイプへの貢献会議での発言

抄録

This paper reports on a thermal probe using a carbon nanotube (CNT) on a platinum hot-film. CNT probe is expected to breakthrough the limitations of the existing ones owing to its unique characteristics but no practical thermal device has been fabricated yet. In order to explore the mechanisms of heating and measuring the smaller region than 10nm, we applied our recently developed sensor coupled with CNT, which consists of a suspended platinum film of 40nm × 500nm × 10micrometer. The principle of this probe as heater and sensor is explained, based on one dimensional heat conduction. Fabrication process using MEMS technique is also introduced, especially for a couple of critical techniques. One is to fabricate the nano sensor on an edge of the sensor substrate. The other is to bond a CNT on the suspended hot-film sensor. A CNT thermal probe using a multi-walled CNT of 70nm diameter and ca. 10 micrometers length is successfully fabricated. Its performances are tested in vacuum environment as to eliminate the presence of in-air conduction effect and water absorption effect around the contact point, which work for heat transport dominantly in atmospheric condition and degrade the spatial resolution. Our CNT probe showed a clear and reliable signal in vacuum and its sensitivity available for nanoscale thermal sensing and heating is confirmed.

元の言語英語
ホスト出版物のタイトルProceedings of the ASME Micro/Nanoscale Heat and Mass Transfer International Conference 2009, MNHMT2009
ページ457-462
ページ数6
2
DOI
出版物ステータス出版済み - 2010
イベントASME 2009 Micro/Nanoscale Heat and Mass Transfer International Conference 2009, MNHMT2009 - Shanghai, 中国
継続期間: 12 18 200912 21 2009

その他

その他ASME 2009 Micro/Nanoscale Heat and Mass Transfer International Conference 2009, MNHMT2009
中国
Shanghai
期間12/18/0912/21/09

Fingerprint

Carbon Nanotubes
Platinum
Carbon nanotubes
Sensors
Vacuum
Heating
Point contacts
Water absorption
Hot Temperature
Heat conduction
MEMS
Fabrication
Substrates
Air

All Science Journal Classification (ASJC) codes

  • Fluid Flow and Transfer Processes

これを引用

Takahashi, K., Hirotani, J., Kai, S., & Ikuta, T. (2010). Carbon nanotube thermal probe using platinum nano hot-film. : Proceedings of the ASME Micro/Nanoscale Heat and Mass Transfer International Conference 2009, MNHMT2009 (巻 2, pp. 457-462) https://doi.org/10.1115/MNHMT2009-18356

Carbon nanotube thermal probe using platinum nano hot-film. / Takahashi, Koji; Hirotani, Jun; Kai, Satoshi; Ikuta, Tatsuya.

Proceedings of the ASME Micro/Nanoscale Heat and Mass Transfer International Conference 2009, MNHMT2009. 巻 2 2010. p. 457-462.

研究成果: 著書/レポートタイプへの貢献会議での発言

Takahashi, K, Hirotani, J, Kai, S & Ikuta, T 2010, Carbon nanotube thermal probe using platinum nano hot-film. : Proceedings of the ASME Micro/Nanoscale Heat and Mass Transfer International Conference 2009, MNHMT2009. 巻. 2, pp. 457-462, ASME 2009 Micro/Nanoscale Heat and Mass Transfer International Conference 2009, MNHMT2009, Shanghai, 中国, 12/18/09. https://doi.org/10.1115/MNHMT2009-18356
Takahashi K, Hirotani J, Kai S, Ikuta T. Carbon nanotube thermal probe using platinum nano hot-film. : Proceedings of the ASME Micro/Nanoscale Heat and Mass Transfer International Conference 2009, MNHMT2009. 巻 2. 2010. p. 457-462 https://doi.org/10.1115/MNHMT2009-18356
Takahashi, Koji ; Hirotani, Jun ; Kai, Satoshi ; Ikuta, Tatsuya. / Carbon nanotube thermal probe using platinum nano hot-film. Proceedings of the ASME Micro/Nanoscale Heat and Mass Transfer International Conference 2009, MNHMT2009. 巻 2 2010. pp. 457-462
@inproceedings{bf5ae5de247d45aa9080bc3ec067f79d,
title = "Carbon nanotube thermal probe using platinum nano hot-film",
abstract = "This paper reports on a thermal probe using a carbon nanotube (CNT) on a platinum hot-film. CNT probe is expected to breakthrough the limitations of the existing ones owing to its unique characteristics but no practical thermal device has been fabricated yet. In order to explore the mechanisms of heating and measuring the smaller region than 10nm, we applied our recently developed sensor coupled with CNT, which consists of a suspended platinum film of 40nm × 500nm × 10micrometer. The principle of this probe as heater and sensor is explained, based on one dimensional heat conduction. Fabrication process using MEMS technique is also introduced, especially for a couple of critical techniques. One is to fabricate the nano sensor on an edge of the sensor substrate. The other is to bond a CNT on the suspended hot-film sensor. A CNT thermal probe using a multi-walled CNT of 70nm diameter and ca. 10 micrometers length is successfully fabricated. Its performances are tested in vacuum environment as to eliminate the presence of in-air conduction effect and water absorption effect around the contact point, which work for heat transport dominantly in atmospheric condition and degrade the spatial resolution. Our CNT probe showed a clear and reliable signal in vacuum and its sensitivity available for nanoscale thermal sensing and heating is confirmed.",
author = "Koji Takahashi and Jun Hirotani and Satoshi Kai and Tatsuya Ikuta",
year = "2010",
doi = "10.1115/MNHMT2009-18356",
language = "English",
isbn = "9780791843895",
volume = "2",
pages = "457--462",
booktitle = "Proceedings of the ASME Micro/Nanoscale Heat and Mass Transfer International Conference 2009, MNHMT2009",

}

TY - GEN

T1 - Carbon nanotube thermal probe using platinum nano hot-film

AU - Takahashi, Koji

AU - Hirotani, Jun

AU - Kai, Satoshi

AU - Ikuta, Tatsuya

PY - 2010

Y1 - 2010

N2 - This paper reports on a thermal probe using a carbon nanotube (CNT) on a platinum hot-film. CNT probe is expected to breakthrough the limitations of the existing ones owing to its unique characteristics but no practical thermal device has been fabricated yet. In order to explore the mechanisms of heating and measuring the smaller region than 10nm, we applied our recently developed sensor coupled with CNT, which consists of a suspended platinum film of 40nm × 500nm × 10micrometer. The principle of this probe as heater and sensor is explained, based on one dimensional heat conduction. Fabrication process using MEMS technique is also introduced, especially for a couple of critical techniques. One is to fabricate the nano sensor on an edge of the sensor substrate. The other is to bond a CNT on the suspended hot-film sensor. A CNT thermal probe using a multi-walled CNT of 70nm diameter and ca. 10 micrometers length is successfully fabricated. Its performances are tested in vacuum environment as to eliminate the presence of in-air conduction effect and water absorption effect around the contact point, which work for heat transport dominantly in atmospheric condition and degrade the spatial resolution. Our CNT probe showed a clear and reliable signal in vacuum and its sensitivity available for nanoscale thermal sensing and heating is confirmed.

AB - This paper reports on a thermal probe using a carbon nanotube (CNT) on a platinum hot-film. CNT probe is expected to breakthrough the limitations of the existing ones owing to its unique characteristics but no practical thermal device has been fabricated yet. In order to explore the mechanisms of heating and measuring the smaller region than 10nm, we applied our recently developed sensor coupled with CNT, which consists of a suspended platinum film of 40nm × 500nm × 10micrometer. The principle of this probe as heater and sensor is explained, based on one dimensional heat conduction. Fabrication process using MEMS technique is also introduced, especially for a couple of critical techniques. One is to fabricate the nano sensor on an edge of the sensor substrate. The other is to bond a CNT on the suspended hot-film sensor. A CNT thermal probe using a multi-walled CNT of 70nm diameter and ca. 10 micrometers length is successfully fabricated. Its performances are tested in vacuum environment as to eliminate the presence of in-air conduction effect and water absorption effect around the contact point, which work for heat transport dominantly in atmospheric condition and degrade the spatial resolution. Our CNT probe showed a clear and reliable signal in vacuum and its sensitivity available for nanoscale thermal sensing and heating is confirmed.

UR - http://www.scopus.com/inward/record.url?scp=77954337669&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=77954337669&partnerID=8YFLogxK

U2 - 10.1115/MNHMT2009-18356

DO - 10.1115/MNHMT2009-18356

M3 - Conference contribution

AN - SCOPUS:77954337669

SN - 9780791843895

VL - 2

SP - 457

EP - 462

BT - Proceedings of the ASME Micro/Nanoscale Heat and Mass Transfer International Conference 2009, MNHMT2009

ER -