Characteristic of VHF plasma produced by balanced power feeding

K. Ogiwara, W. Chen, K. Uchino, Y. Kawai

研究成果: Contribution to journalConference article査読

1 被引用数 (Scopus)

抄録

The characteristics of a VHF hydrogen plasma produced by a balanced power feeding method were examined using a two-dimensional hybrid model. The simulation results showed that the electron density peaks at a certain pressure inside the discharge electrodes and significantly decreases outside the electrodes for high gas pressure. In addition, the power absorption efficiency inside the electrodes was improved by increasing the gas pressure. On the other hand, the plasma was produced within the electrodes for low applied voltages.

本文言語英語
論文番号012022
ジャーナルJournal of Physics: Conference Series
441
1
DOI
出版ステータス出版済み - 2013
イベント11th Asia Pacific Conference on Plasma Science and Technology, APCPST 2012 and 25th Symposium on Plasma Science for Materials, SPSM 2012 - Kyoto, 日本
継続期間: 10 2 201210 5 2012

All Science Journal Classification (ASJC) codes

  • 物理学および天文学(全般)

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