抄録
The characteristics of a VHF hydrogen plasma produced by a balanced power feeding method were examined using a two-dimensional hybrid model. The simulation results showed that the electron density peaks at a certain pressure inside the discharge electrodes and significantly decreases outside the electrodes for high gas pressure. In addition, the power absorption efficiency inside the electrodes was improved by increasing the gas pressure. On the other hand, the plasma was produced within the electrodes for low applied voltages.
| 元の言語 | 英語 |
|---|---|
| 記事番号 | 012022 |
| ジャーナル | Journal of Physics: Conference Series |
| 巻 | 441 |
| 発行部数 | 1 |
| DOI | |
| 出版物ステータス | 出版済み - 1 1 2013 |
| イベント | 11th Asia Pacific Conference on Plasma Science and Technology, APCPST 2012 and 25th Symposium on Plasma Science for Materials, SPSM 2012 - Kyoto, 日本 継続期間: 10 2 2012 → 10 5 2012 |
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All Science Journal Classification (ASJC) codes
- Physics and Astronomy(all)
これを引用
Characteristic of VHF plasma produced by balanced power feeding. / Ogiwara, K.; Chen, W.; Uchino, K.; Kawai, Y.
：: Journal of Physics: Conference Series, 巻 441, 番号 1, 012022, 01.01.2013.研究成果: ジャーナルへの寄稿 › Conference article
}
TY - JOUR
T1 - Characteristic of VHF plasma produced by balanced power feeding
AU - Ogiwara, K.
AU - Chen, W.
AU - Uchino, K.
AU - Kawai, Y.
PY - 2013/1/1
Y1 - 2013/1/1
N2 - The characteristics of a VHF hydrogen plasma produced by a balanced power feeding method were examined using a two-dimensional hybrid model. The simulation results showed that the electron density peaks at a certain pressure inside the discharge electrodes and significantly decreases outside the electrodes for high gas pressure. In addition, the power absorption efficiency inside the electrodes was improved by increasing the gas pressure. On the other hand, the plasma was produced within the electrodes for low applied voltages.
AB - The characteristics of a VHF hydrogen plasma produced by a balanced power feeding method were examined using a two-dimensional hybrid model. The simulation results showed that the electron density peaks at a certain pressure inside the discharge electrodes and significantly decreases outside the electrodes for high gas pressure. In addition, the power absorption efficiency inside the electrodes was improved by increasing the gas pressure. On the other hand, the plasma was produced within the electrodes for low applied voltages.
UR - http://www.scopus.com/inward/record.url?scp=84881045575&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84881045575&partnerID=8YFLogxK
U2 - 10.1088/1742-6596/441/1/012022
DO - 10.1088/1742-6596/441/1/012022
M3 - Conference article
AN - SCOPUS:84881045575
VL - 441
JO - Journal of Physics: Conference Series
JF - Journal of Physics: Conference Series
SN - 1742-6588
IS - 1
M1 - 012022
ER -