Characteristic of VHF plasma produced by balanced power feeding

K. Ogiwara, W. Chen, K. Uchino, Y. Kawai

研究成果: ジャーナルへの寄稿Conference article

1 引用 (Scopus)

抄録

The characteristics of a VHF hydrogen plasma produced by a balanced power feeding method were examined using a two-dimensional hybrid model. The simulation results showed that the electron density peaks at a certain pressure inside the discharge electrodes and significantly decreases outside the electrodes for high gas pressure. In addition, the power absorption efficiency inside the electrodes was improved by increasing the gas pressure. On the other hand, the plasma was produced within the electrodes for low applied voltages.

元の言語英語
記事番号012022
ジャーナルJournal of Physics: Conference Series
441
発行部数1
DOI
出版物ステータス出版済み - 1 1 2013
イベント11th Asia Pacific Conference on Plasma Science and Technology, APCPST 2012 and 25th Symposium on Plasma Science for Materials, SPSM 2012 - Kyoto, 日本
継続期間: 10 2 201210 5 2012

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electrodes
gas pressure
hydrogen plasma
low voltage
simulation

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy(all)

これを引用

Characteristic of VHF plasma produced by balanced power feeding. / Ogiwara, K.; Chen, W.; Uchino, K.; Kawai, Y.

:: Journal of Physics: Conference Series, 巻 441, 番号 1, 012022, 01.01.2013.

研究成果: ジャーナルへの寄稿Conference article

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