Characteristics of a monolithically integrated micro-displacement sensor

Toshihiro Takeshita, Yao Peng, Nobutomo Morita, Hideyuki Ando, Eiji Higurashi, Renshi Sawada

    研究成果: Chapter in Book/Report/Conference proceedingConference contribution

    8 被引用数 (Scopus)

    抄録

    The authors report on the development of an optical ultra-micro- displacement sensor with a simple structure that is 3.0 x 3.0 mm square and 1.3 mm thick, and fabricated using MEMS technology. The displacement sensor only consists of a vertical cavity surface emitting laser (VCSEL), eight two-dimensional monolithically integrated photodiodes (PDs), a frame and a cover glass. The sensor principle is laser triangulation. With the eight PDs arranged in concentric circles around the VCSEL, the influences of mirror tilt and changes in mirror reflectivity are expected to be eliminated. This sensor can measure linear displacement within an accuracy of 0.856 % F.S. at 200 μm, and 1.11 % F.S. at 500 μm. Moreover, when the tilt of the object being measured is less than 0.6°, the influence of the tilt can be ignored to some extent. In this paper, we present our method for measuring the mirror displacement and removing any influences of mirror tilt and change in mirror reflectivity.

    本文言語英語
    ホスト出版物のタイトル14th Joint Int. IMEKO TC1, TC7, TC13 Symposium on Intelligent Quality Measurements - Theory, Education and Training 2011, Held in Conjunction with the 56th IWK Ilmenau University of Technology
    ページ133-138
    ページ数6
    出版ステータス出版済み - 2011
    イベント14th Joint International IMEKO TC1, TC7, TC13 Symposium on Intelligent Quality Measurements - Theory, Education and Training 2011, Held in Conjunction with the 56th IWK Ilmenau University of Technology - Jena, ドイツ
    継続期間: 8 31 20119 2 2011

    出版物シリーズ

    名前14th Joint International IMEKO TC1, TC7, TC13 Symposium on Intelligent Quality Measurements - Theory, Education and Training 2011, Held in Conj. with the 56th IWK Ilmenau University of Technology

    その他

    その他14th Joint International IMEKO TC1, TC7, TC13 Symposium on Intelligent Quality Measurements - Theory, Education and Training 2011, Held in Conjunction with the 56th IWK Ilmenau University of Technology
    Countryドイツ
    CityJena
    Period8/31/119/2/11

    All Science Journal Classification (ASJC) codes

    • Artificial Intelligence
    • Safety, Risk, Reliability and Quality

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