Characteristics of floating potential in negative ion plasma

Jing Ying Zhang, Ryuta Ichiki, Kiichiro Uchino, Yoshinobu Kawai

研究成果: ジャーナルへの寄稿記事

2 引用 (Scopus)

抄録

We proposed the floating potential method to estimate the negative ion density in a negative ion plasma. The floating potential in a negative ion double plasma was examined as a function of negative ion concentration and compared with the theoretical value calculated from the sheath equation including negative ions. Here, the negative ion plasma was produced by introducing SF6 gas into a Xe (Ar) double plasma. The negative ion density mormalized to the ion density was estimated from the reduction of the electron saturation current. It was found that the observed floating potential agree with the theoretical values qualitatively. In this paper, we propose the floating potential method to estimate the negative ion density in a negative ion plasma. The characteristics of the floating potential in a SF6/Xe double plasma are examined with the Langmuir probe, where the negative ion concentration is estimated from the reduction of the electron saturation current. It is found that the observed floating potential agrees with the theoretical values calculated using the sheath equation including negative ions.

元の言語英語
ページ(範囲)545-550
ページ数6
ジャーナルPlasma Processes and Polymers
11
発行部数6
DOI
出版物ステータス出版済み - 6 2014

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negative ions
floating
Negative ions
Plasmas
ion concentration
sheaths
saturation
Langmuir probes
Electrons
electrostatic probes
estimates
electrons
Gases
Ions

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Polymers and Plastics

これを引用

Characteristics of floating potential in negative ion plasma. / Zhang, Jing Ying; Ichiki, Ryuta; Uchino, Kiichiro; Kawai, Yoshinobu.

:: Plasma Processes and Polymers, 巻 11, 番号 6, 06.2014, p. 545-550.

研究成果: ジャーナルへの寄稿記事

Zhang, Jing Ying ; Ichiki, Ryuta ; Uchino, Kiichiro ; Kawai, Yoshinobu. / Characteristics of floating potential in negative ion plasma. :: Plasma Processes and Polymers. 2014 ; 巻 11, 番号 6. pp. 545-550.
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