Characteristics of laser-ablated plasma and properties of diamond-like carbon film in pulsed laser deposition

Yukihiko Yamagata; Tamiko Ohshima; Tomoaki Ikegami; Raj K. Thareja; Kenji Ebihara; Ajay Sharma; Robert M. Mayo; Jagdish Narayan

Characteristics of laser-ablated plasma and properties of diamond-like carbon film in pulsed laser deposition

Yukihiko Yamagata, Tamiko Ohshima, Tomoaki Ikegami, Raj K. Thareja, Kenji Ebihara, Ajay Sharma, Robert M. Mayo, Jagdish Narayan

研究成果: ジャーナルへの寄稿 › 学術誌 › 査読

1 被引用数 (Scopus)

抄録

Characteristics of laser-ablated carbon plasma and properties of diamond-like carbon film in KrF pulsed laser deposition were investigated using laser-induced fluorescence (LIF) and optical emission spectroscopy. Two-dimensional LIF images of C₂ (Swan band, d³Π_g - a ³Π_u) and C₃ (Comet Head System, A ¹Π_u-X ¹ σ_g⁺) molecules were detected as a function of laser energy density by narrow band pass filters and an intensified CCD camera. C₂ LIF intensity is found to be weaker in the central part of the plume than that at the periphery at incident energy greater than 6 J/cm². It is conjectured that C₂ molecules are dissociated by collision with energetic species in the central part of the ablation plume, and degrade the diamond-like property of deposited films.

本文言語	英語
ページ（範囲）	P6551-P6556
ジャーナル	Materials Research Society Symposium - Proceedings
巻	648
出版ステータス	出版済み - 1月 1 2001
外部発表	はい

!!!All Science Journal Classification (ASJC) codes

材料科学（全般）
凝縮系物理学
材料力学
機械工学

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title = "Characteristics of laser-ablated plasma and properties of diamond-like carbon film in pulsed laser deposition",

abstract = "Characteristics of laser-ablated carbon plasma and properties of diamond-like carbon film in KrF pulsed laser deposition were investigated using laser-induced fluorescence (LIF) and optical emission spectroscopy. Two-dimensional LIF images of C2 (Swan band, d3Πg - a 3Πu) and C3 (Comet Head System, A 1Πu-X 1 σg+) molecules were detected as a function of laser energy density by narrow band pass filters and an intensified CCD camera. C2 LIF intensity is found to be weaker in the central part of the plume than that at the periphery at incident energy greater than 6 J/cm2. It is conjectured that C2 molecules are dissociated by collision with energetic species in the central part of the ablation plume, and degrade the diamond-like property of deposited films.",

author = "Yukihiko Yamagata and Tamiko Ohshima and Tomoaki Ikegami and Thareja, {Raj K.} and Kenji Ebihara and Ajay Sharma and Mayo, {Robert M.} and Jagdish Narayan",

year = "2001",

month = jan,

day = "1",

language = "English",

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pages = "P6551--P6556",

journal = "Materials Research Society Symposium - Proceedings",

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publisher = "Materials Research Society",

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T1 - Characteristics of laser-ablated plasma and properties of diamond-like carbon film in pulsed laser deposition

AU - Yamagata, Yukihiko

AU - Ohshima, Tamiko

AU - Ikegami, Tomoaki

AU - Thareja, Raj K.

AU - Ebihara, Kenji

AU - Sharma, Ajay

AU - Mayo, Robert M.

AU - Narayan, Jagdish

PY - 2001/1/1

Y1 - 2001/1/1

N2 - Characteristics of laser-ablated carbon plasma and properties of diamond-like carbon film in KrF pulsed laser deposition were investigated using laser-induced fluorescence (LIF) and optical emission spectroscopy. Two-dimensional LIF images of C2 (Swan band, d3Πg - a 3Πu) and C3 (Comet Head System, A 1Πu-X 1 σg+) molecules were detected as a function of laser energy density by narrow band pass filters and an intensified CCD camera. C2 LIF intensity is found to be weaker in the central part of the plume than that at the periphery at incident energy greater than 6 J/cm2. It is conjectured that C2 molecules are dissociated by collision with energetic species in the central part of the ablation plume, and degrade the diamond-like property of deposited films.

AB - Characteristics of laser-ablated carbon plasma and properties of diamond-like carbon film in KrF pulsed laser deposition were investigated using laser-induced fluorescence (LIF) and optical emission spectroscopy. Two-dimensional LIF images of C2 (Swan band, d3Πg - a 3Πu) and C3 (Comet Head System, A 1Πu-X 1 σg+) molecules were detected as a function of laser energy density by narrow band pass filters and an intensified CCD camera. C2 LIF intensity is found to be weaker in the central part of the plume than that at the periphery at incident energy greater than 6 J/cm2. It is conjectured that C2 molecules are dissociated by collision with energetic species in the central part of the ablation plume, and degrade the diamond-like property of deposited films.

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M3 - Article

AN - SCOPUS:0035558217

SN - 0272-9172

VL - 648

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JO - Materials Research Society Symposium - Proceedings

JF - Materials Research Society Symposium - Proceedings

ER -

Characteristics of laser-ablated plasma and properties of diamond-like carbon film in pulsed laser deposition

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!!!All Science Journal Classification (ASJC) codes

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