Microwave plasma sterilization has recently been attracting attention for medical applications. However, it is difficult to perform low-temperature sterilization in short time periods. Increasing the output power shortens the time required for sterilization but causes the temperature to increase. To overcome this issue, we have developed a hybrid plasma system that combines a microwave torch plasma and a high-voltage mesh plasma, which allows radicals to be produced at low temperatures. Using this system, successful sterilization was shown to be possible in a period of 45 min at a temperature of 41 °C.
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