Characterization of gated cold cathode fabrication using standing thin-film technique

Tomoya Yoshida, Tanemasa Asano

研究成果: Chapter in Book/Report/Conference proceedingConference contribution

抄録

We have proposed a novel process of fabricating a high-aspect-ratio tip structure, which utilizes the bending of a cantilever made of a sputter deposited WSi2 film induced by ion irradiation. We demonstrated high-current field-electron emission from a gated field emitter array (FEA) fabricated by using the thin-film standing technique. In this paper, characterization of the FEA particularly in terms of emission stability and uniformity is reported. We find an ac-driving is more suitable than a dc-driving in order to decrease the required number of tips in a pixel and to meet the requirement of FED application.

本文言語英語
ホスト出版物のタイトル8th IEEE International Vacuum Electronics Conference, IVEC 2007
ページ201-202
ページ数2
DOI
出版ステータス出版済み - 12 1 2007
イベント8th IEEE International Vacuum Electronics Conference, IVEC 2007 - Kitakyushu, 日本
継続期間: 5 15 20075 17 2007

出版物シリーズ

名前8th IEEE International Vacuum Electronics Conference, IVEC 2007

その他

その他8th IEEE International Vacuum Electronics Conference, IVEC 2007
国/地域日本
CityKitakyushu
Period5/15/075/17/07

All Science Journal Classification (ASJC) codes

  • 電子工学および電気工学

フィンガープリント

「Characterization of gated cold cathode fabrication using standing thin-film technique」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

引用スタイル