Characterization of Polycapillary Optics in a TES Microcalorimeter EDS System Installed on an SEM

A. Takano, K. Maehata, N. Iyomoto, K. Yasuda, H. Maeno, K. Shiiyama, K. Tanaka

研究成果: Contribution to journalArticle査読

4 被引用数 (Scopus)

抄録

Energy-dispersive spectroscopic measurements are performed using a superconducting transition-edge sensor (TES) microcalorimeter mounted on a scanning electron microscope (SEM) for advanced research at Kyushu University. Because the sensitive area of the TES microcalorimeter is about 0.02mm2, polycapillary optics is used to collect the X-rays emitted by the SEM specimen on the TES microcalorimeter. The X-ray transmission efficiency of the polycapillary optics is obtained by analyzing the X-ray energy spectra measured by the TES microcalorimeter. The obtained transmission efficiency of the polycapillary optics is reproduced by the calculated results of the simulation.

本文言語英語
ページ(範囲)832-838
ページ数7
ジャーナルJournal of Low Temperature Physics
184
3-4
DOI
出版ステータス出版済み - 8 1 2016

All Science Journal Classification (ASJC) codes

  • 原子分子物理学および光学
  • 材料科学(全般)
  • 凝縮系物理学

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