Characterization of surface microstructures on Bio-based Polymer film fabricated with nano-imprint lithography by synchrotron radiation small angle X-ray scattering

Takamichi Shinohara, Tomoko Shirahase, Daiki Murakami, Taiki Hoshino, Moriya Kikuchi, Jun Ichiro Koike, Misao Horigome, Hiroyasu Masunaga, Hiroki Ogawa, Atsushi Takahara

研究成果: ジャーナルへの寄稿Conference article

6 引用 (Scopus)

抄録

Nano-imprint lithography (NIL) is a simple, low cost and high-resolution patterning method. However the precise evaluation method of nano-imprinted structure has not been established. Synchrotron radiation small angle X-ray scattering (SR-SAXS) measurement is a nondestructive and high resolution characterization method. In this study, we attempt to fabricate nanostructures on the poly(lactic acid) (PLA) film by NIL and evaluated with microscopic and scattering techniques. The mold with line/space pattern was used for NIL. Scanning electron microscope observation confirmed the formation of surface nano-structure in large areas. Also, nano-imprinted PLA film was evaluated using SR-SAXS measurement. The scattering patterns obtained from nano-imprinted PLA films were clearly observed up to higher order scattering spots. These results suggested that highly regular structure was fabricated on the surface of PLA films.

元の言語英語
記事番号012004
ジャーナルIOP Conference Series: Materials Science and Engineering
24
発行部数1
DOI
出版物ステータス出版済み - 11 22 2011
イベント2010 Summer Workshop on Buried Interface Science with X-Rays and Neutrons - Nagoya, 日本
継続期間: 7 25 20107 27 2010

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Synchrotron radiation
X ray scattering
Polymer films
Lithography
Microstructure
Scattering
Lactic acid
Nanostructures
Electron microscopes
Scanning
Costs

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Engineering(all)

これを引用

Characterization of surface microstructures on Bio-based Polymer film fabricated with nano-imprint lithography by synchrotron radiation small angle X-ray scattering. / Shinohara, Takamichi; Shirahase, Tomoko; Murakami, Daiki; Hoshino, Taiki; Kikuchi, Moriya; Koike, Jun Ichiro; Horigome, Misao; Masunaga, Hiroyasu; Ogawa, Hiroki; Takahara, Atsushi.

:: IOP Conference Series: Materials Science and Engineering, 巻 24, 番号 1, 012004, 22.11.2011.

研究成果: ジャーナルへの寄稿Conference article

Shinohara, Takamichi ; Shirahase, Tomoko ; Murakami, Daiki ; Hoshino, Taiki ; Kikuchi, Moriya ; Koike, Jun Ichiro ; Horigome, Misao ; Masunaga, Hiroyasu ; Ogawa, Hiroki ; Takahara, Atsushi. / Characterization of surface microstructures on Bio-based Polymer film fabricated with nano-imprint lithography by synchrotron radiation small angle X-ray scattering. :: IOP Conference Series: Materials Science and Engineering. 2011 ; 巻 24, 番号 1.
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abstract = "Nano-imprint lithography (NIL) is a simple, low cost and high-resolution patterning method. However the precise evaluation method of nano-imprinted structure has not been established. Synchrotron radiation small angle X-ray scattering (SR-SAXS) measurement is a nondestructive and high resolution characterization method. In this study, we attempt to fabricate nanostructures on the poly(lactic acid) (PLA) film by NIL and evaluated with microscopic and scattering techniques. The mold with line/space pattern was used for NIL. Scanning electron microscope observation confirmed the formation of surface nano-structure in large areas. Also, nano-imprinted PLA film was evaluated using SR-SAXS measurement. The scattering patterns obtained from nano-imprinted PLA films were clearly observed up to higher order scattering spots. These results suggested that highly regular structure was fabricated on the surface of PLA films.",
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AU - Shirahase, Tomoko

AU - Murakami, Daiki

AU - Hoshino, Taiki

AU - Kikuchi, Moriya

AU - Koike, Jun Ichiro

AU - Horigome, Misao

AU - Masunaga, Hiroyasu

AU - Ogawa, Hiroki

AU - Takahara, Atsushi

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