Characterization of surface microstructures on Bio-based Polymer film fabricated with nano-imprint lithography by synchrotron radiation small angle X-ray scattering

Takamichi Shinohara, Tomoko Shirahase, Daiki Murakami, Taiki Hoshino, Moriya Kikuchi, Jun Ichiro Koike, Misao Horigome, Hiroyasu Masunaga, Hiroki Ogawa, Atsushi Takahara

研究成果: Contribution to journalConference article査読

6 被引用数 (Scopus)

抄録

Nano-imprint lithography (NIL) is a simple, low cost and high-resolution patterning method. However the precise evaluation method of nano-imprinted structure has not been established. Synchrotron radiation small angle X-ray scattering (SR-SAXS) measurement is a nondestructive and high resolution characterization method. In this study, we attempt to fabricate nanostructures on the poly(lactic acid) (PLA) film by NIL and evaluated with microscopic and scattering techniques. The mold with line/space pattern was used for NIL. Scanning electron microscope observation confirmed the formation of surface nano-structure in large areas. Also, nano-imprinted PLA film was evaluated using SR-SAXS measurement. The scattering patterns obtained from nano-imprinted PLA films were clearly observed up to higher order scattering spots. These results suggested that highly regular structure was fabricated on the surface of PLA films.

本文言語英語
論文番号012004
ジャーナルIOP Conference Series: Materials Science and Engineering
24
1
DOI
出版ステータス出版済み - 11 22 2011
イベント2010 Summer Workshop on Buried Interface Science with X-Rays and Neutrons - Nagoya, 日本
継続期間: 7 25 20107 27 2010

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Engineering(all)

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