Circular motion control of an optically trapped microprobe for nano-position sensing

Yuto Nagasaka, Yasuhiro Takaya, Terutake Hayashi

研究成果: 書籍/レポート タイプへの寄稿会議への寄与

1 被引用数 (Scopus)

抄録

As a position sensing probe for Nano-CMM which measures three-dimensional shapes of microparts, we propose a novel probing technique using circular motion of an optically trapped microsphere. In this report, a fundamental principle is described for sensing a coordinate on a work surface using a circular motion probe. The circular motion of the trapped sphere near a work surface becomes an ellipse compressed perpendicularly to the surface due to the change of viscous drag of the sphere. The elliptical orbit of the trapped sphere depends on a distance from the surface and a normal vector direction of the surface. By processing the elliptical orbit, the circular motion probe can detect a position and a plane normal vector of the work surface simultaneously. In order to verify feasibility of this method, fundamental experiments are carried out. The circular motion probe is approached to a vertical silicon cleavage surface. The behavior of the trapped sphere near the surface agrees well with the theory. Based on the elliptical orbit of the trapped sphere near the surface, a position and a plane normal vector of the surface are estimated. It is verified that the circular motion probe can detect a position of a work surface with resolution of better than 50nm and detect a plane normal vector of the surface.

本文言語英語
ホスト出版物のタイトルOptical Trapping and Optical Micromanipulation IV
DOI
出版ステータス出版済み - 12月 1 2007
外部発表はい
イベントOptical Trapping and Optical Micromanipulation IV - San Diego, CA, 米国
継続期間: 8月 26 20078月 29 2007

出版物シリーズ

名前Proceedings of SPIE - The International Society for Optical Engineering
6644
ISSN(印刷版)0277-786X

その他

その他Optical Trapping and Optical Micromanipulation IV
国/地域米国
CitySan Diego, CA
Period8/26/078/29/07

!!!All Science Journal Classification (ASJC) codes

  • 電子材料、光学材料、および磁性材料
  • 凝縮系物理学
  • コンピュータ サイエンスの応用
  • 応用数学
  • 電子工学および電気工学

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