Combinatorial analysis of plasma-surface interactions of poly(ethylene terephthalate) with X-ray photoelectron spectroscopy

Kosuke Takenaka, Ken Cho, Yuichi Setsuhara, Masaharu Shiratani, Makoto Sekine, Masaru Hori

研究成果: Contribution to journalArticle査読

4 被引用数 (Scopus)

抄録

Combinatorial analysis has been demonstrated for the examination of plasma-surface interactions of poly(ethylene terephthalate) (PET) in terms of chemical bonding state, with X-ray photoelectron spectroscopy (XPS). The chemical bonding states have been investigated for PET films exposed to an argon-oxygen mixture plasma with a density gradient sustained with RF power of 88, 175, and 350 W. The XPS results obtained from three batches of experiments showed a slight increase in the bond peaks caused by the oxidation of which PET with an increase in the product of (ion saturation current) δ (plasma exposure time), corresponds to ion dose.

本文言語英語
論文番号08JA02
ジャーナルJapanese journal of applied physics
49
8 PART 2
DOI
出版ステータス出版済み - 8 1 2010

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy(all)

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