Comparative study on EUV and debris emission from CO 2 and Nd: YAG laser-produced tin plasmas

Akihiko Takahashi, Daisuke Nakamura, K. Tamaru, T. Akiyama, T. Okada

研究成果: ジャーナルへの寄稿Conference article

5 引用 (Scopus)

抄録

The emission characteristics of debris from laser-produced tin plasma were investigated for an extreme ultraviolet lithography (EUV) light source. The ions and droplets emitted from tin plasma produced by a CO 2 laser or an Nd: YAG laser were detected with Faraday cups and quartz crystal micro-balance (QCM) detectors, respectively. A higher ion kinetic energy and a lower droplet emission were observed in the case of CO 2 laser in compared with Nd: YAG laser for the same laser energy (50 mJ). The reason comes from the interaction of the laser pulse with the plasma. CO 2 laser is absorbed in superficial region of the plasma due to the long wavelength, in contrast, Nd: YAG laser penetrates deeply into the plasma. Therefore, the absorbed energy density of CO 2 laser will be much larger than that of Nd: YAG laser for the same laser energy. This causes the higher ion energy and complete vaporizing the target material.

元の言語英語
記事番号042059
ジャーナルJournal of Physics: Conference Series
112
発行部数Part 4
DOI
出版物ステータス出版済み - 6 12 2008
イベント5th International Conference on Inertial Fusion Sciences and Applications, IFSA 2007 - Kobe, 日本
継続期間: 9 9 20079 14 2007

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debris
YAG lasers
tin
lithography
lasers
ions
vaporizing
quartz crystals
energy
light sources
flux density
kinetic energy
causes
detectors
pulses
wavelengths
crystals

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy(all)

これを引用

Comparative study on EUV and debris emission from CO 2 and Nd : YAG laser-produced tin plasmas. / Takahashi, Akihiko; Nakamura, Daisuke; Tamaru, K.; Akiyama, T.; Okada, T.

:: Journal of Physics: Conference Series, 巻 112, 番号 Part 4, 042059, 12.06.2008.

研究成果: ジャーナルへの寄稿Conference article

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abstract = "The emission characteristics of debris from laser-produced tin plasma were investigated for an extreme ultraviolet lithography (EUV) light source. The ions and droplets emitted from tin plasma produced by a CO 2 laser or an Nd: YAG laser were detected with Faraday cups and quartz crystal micro-balance (QCM) detectors, respectively. A higher ion kinetic energy and a lower droplet emission were observed in the case of CO 2 laser in compared with Nd: YAG laser for the same laser energy (50 mJ). The reason comes from the interaction of the laser pulse with the plasma. CO 2 laser is absorbed in superficial region of the plasma due to the long wavelength, in contrast, Nd: YAG laser penetrates deeply into the plasma. Therefore, the absorbed energy density of CO 2 laser will be much larger than that of Nd: YAG laser for the same laser energy. This causes the higher ion energy and complete vaporizing the target material.",
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T2 - YAG laser-produced tin plasmas

AU - Takahashi, Akihiko

AU - Nakamura, Daisuke

AU - Tamaru, K.

AU - Akiyama, T.

AU - Okada, T.

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N2 - The emission characteristics of debris from laser-produced tin plasma were investigated for an extreme ultraviolet lithography (EUV) light source. The ions and droplets emitted from tin plasma produced by a CO 2 laser or an Nd: YAG laser were detected with Faraday cups and quartz crystal micro-balance (QCM) detectors, respectively. A higher ion kinetic energy and a lower droplet emission were observed in the case of CO 2 laser in compared with Nd: YAG laser for the same laser energy (50 mJ). The reason comes from the interaction of the laser pulse with the plasma. CO 2 laser is absorbed in superficial region of the plasma due to the long wavelength, in contrast, Nd: YAG laser penetrates deeply into the plasma. Therefore, the absorbed energy density of CO 2 laser will be much larger than that of Nd: YAG laser for the same laser energy. This causes the higher ion energy and complete vaporizing the target material.

AB - The emission characteristics of debris from laser-produced tin plasma were investigated for an extreme ultraviolet lithography (EUV) light source. The ions and droplets emitted from tin plasma produced by a CO 2 laser or an Nd: YAG laser were detected with Faraday cups and quartz crystal micro-balance (QCM) detectors, respectively. A higher ion kinetic energy and a lower droplet emission were observed in the case of CO 2 laser in compared with Nd: YAG laser for the same laser energy (50 mJ). The reason comes from the interaction of the laser pulse with the plasma. CO 2 laser is absorbed in superficial region of the plasma due to the long wavelength, in contrast, Nd: YAG laser penetrates deeply into the plasma. Therefore, the absorbed energy density of CO 2 laser will be much larger than that of Nd: YAG laser for the same laser energy. This causes the higher ion energy and complete vaporizing the target material.

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