Comparison of electron property measurements in an inductively coupled plasma made by Langmuir probe and laser Thomson scattering techniques

M. D. Bowden, M. Kogano, Y. Suetome, T. Hori, K. Uchino, K. Muraoka

研究成果: Contribution to journalReview article査読

29 被引用数 (Scopus)

抄録

Langmuir probes and Thomson scattering are two independent methods of measuring electron properties in glow discharges. In this article, measurements of electron properties of an inductively coupled plasma were made using both methods, and the results obtained with the probe were compared with those obtained using the more reliable laser method. The values of electron temperature and density obtained by both methods were similar over a range of plasma conditions but significant differences in the electron energy distribution function were observed. In addition, clear evidence was obtained that the presence of the probe perturbed the discharge. The advantages and disadvantages of each method are discussed with respect to the suitability of each technique tor measuring electron properties in inductively coupled glow discharges.

本文言語英語
ページ(範囲)493-499
ページ数7
ジャーナルJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
17
2
DOI
出版ステータス出版済み - 1999

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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