Compositional change of silicon carbide surface due to oxygen adsorption and heat treatment

Hideki Minagawa, Raul Oscar Vina, Tohru Kadowaki, Seigi Mizuno, Hiroshi Tochihara, Kazunobu Hayakawa, Isamu Toyoshima

研究成果: Contribution to journalArticle査読

2 被引用数 (Scopus)

抄録

The compositional change of the 6H-SiC(10&bar1;0) surface was studied under heat treatment and adsorption of oxygen. X-ray photoelectron spectroscopy (XPS) was used for the analysis of the depth composition profile and chemical binding state. After heat treatment, the carbon concentration of the surface was increased due to the surface segregation of the graphite type carbon. When the adsoption of oxygen was performed with heat treatment, the carbon concentration of the surface was increased, but the amount of segregated carbon was less than that of the sample after only heat treatment. The segregated carbon seemed to react with oxygen preferentialy and to desorb from the surface as a carbon monoxide or carbon dioxide.

本文言語英語
ページ(範囲)L1707-L1709
ジャーナルJapanese journal of applied physics
31
12
DOI
出版ステータス出版済み - 12 1992
外部発表はい

All Science Journal Classification (ASJC) codes

  • 工学(全般)
  • 物理学および天文学(全般)

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