Compositional distribution of laser-deposited films and rapid sequential pulsed laser deposition

Yukio Watanabe, Y. Seo, M. Tanamura, H. Asami, Y. Matsumoto

研究成果: ジャーナルへの寄稿記事

7 引用 (Scopus)

抄録

Compositional distributions of films laser deposited in vacuo at energy densities <1 J/cm 2 were found to be partly different from previous observations and theories. Analyzing them, we have inferred that evaporation processes at low energy densities contain decomposition of the target materials and evaporation of the decomposed materials. Based on these analyses, we have concluded that pulsed laser codeposition was one of best pulsed laser deposition methods. To realize this using one laser source, a modified version of pulsed-laser-deposition rapid-sequential-pulsed-laser deposition, is introduced. The dependence of YBa 2 Cu 3 O 7 films properties on deposition conditions is discussed. Elimination of particulates is demonstrated and good electrical and crystallographic properties as well as suppression of precipitates were achieved in films having the correct stoichiometric composition.

元の言語英語
ページ(範囲)5126-5135
ページ数10
ジャーナルJournal of Applied Physics
78
発行部数8
DOI
出版物ステータス出版済み - 12 1 1995
外部発表Yes

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pulsed laser deposition
flux density
evaporation
lasers
particulates
precipitates
elimination
pulsed lasers
electrical properties
retarding
decomposition

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy(all)

これを引用

Compositional distribution of laser-deposited films and rapid sequential pulsed laser deposition. / Watanabe, Yukio; Seo, Y.; Tanamura, M.; Asami, H.; Matsumoto, Y.

:: Journal of Applied Physics, 巻 78, 番号 8, 01.12.1995, p. 5126-5135.

研究成果: ジャーナルへの寄稿記事

Watanabe, Yukio ; Seo, Y. ; Tanamura, M. ; Asami, H. ; Matsumoto, Y. / Compositional distribution of laser-deposited films and rapid sequential pulsed laser deposition. :: Journal of Applied Physics. 1995 ; 巻 78, 番号 8. pp. 5126-5135.
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