Compositionally gradient thin film deposition by pulse laser ablation under high gravity

Takashi Nishiyama, Takashi Kajiwara, Kunihito Nagayama

研究成果: 書籍/レポート タイプへの寄稿会議への寄与

抄録

A compositionally graded thin film of Fe/Si was fabricated by a gravity-assisted pulsed laser ablation (GAPLA) system. By this method, a compositionally graded structure along gravity direction was successfully produced under a gravity field of 5,400 G. Systematic experiments were conducted by several parameters, including gravity, distance between target and substrate, and laser fluence in case of typical target material of iron disilicide (FeSi2). We demonstrate that the atomic fraction of Fe, the heavier component of the thin film, showed increasing spatial distribution with the direction of gravity. Relatively high laser fluence as well as a very narrow space between the target and the substrate are found to be essential to the compositionally gradient of thin film.

本文言語英語
ホスト出版物のタイトルDiffusion in Materials - DIMAT 2011
出版社Trans Tech Publications Ltd
ページ559-563
ページ数5
323-325
ISBN(印刷版)9783037853979
DOI
出版ステータス出版済み - 2012
イベント8th International Conference on Diffusion in Materials, DIMAT 2011 - Dijon, フランス
継続期間: 7月 3 20117月 8 2011

その他

その他8th International Conference on Diffusion in Materials, DIMAT 2011
国/地域フランス
CityDijon
Period7/3/117/8/11

!!!All Science Journal Classification (ASJC) codes

  • 放射線
  • 材料科学(全般)
  • 凝縮系物理学

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