Comprehensive study of thermal transport and coherent acoustic-phonon wave propagation in thin metal film - Substrate by applying picosecond laser pump - Probe method

Weigang Ma, Tingting Miao, Xing Zhang, Masamichi Kohno, Yasuyuki Takata

研究成果: Contribution to journalArticle査読

30 被引用数 (Scopus)

抄録

Three-dimensional integration with through silicon vias offers a promising solution for future technology nodes. However, the heat accumulation and thermal strain may seriously affect performance, leakage, and reliability of circuits. The cross-plane thermal transport, generation, and propagation of coherent acoustic-phonon wave in thin Pt film-glass substrate have been comprehensively studied by applying the picosecond laser pump-probe method with different configurations. Significantly different time-dependent reflectance signals have been obtained in different configurations and an effect superposition model is proposed to account for cross plane thermal transport inducing ipsi- and contralateral temperature change in thin Pt film, propagation of coherent acoustic-phonon wave in thin Pt film and in glass substrate. The corresponding theoretical predictions match well with the experimental data in the whole delay time range.

本文言語英語
ページ(範囲)5152-5159
ページ数8
ジャーナルJournal of Physical Chemistry C
119
9
DOI
出版ステータス出版済み - 3 5 2015

All Science Journal Classification (ASJC) codes

  • 電子材料、光学材料、および磁性材料
  • エネルギー(全般)
  • 物理化学および理論化学
  • 表面、皮膜および薄膜

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