Conductive and resistive nanocrystalline diamond films studied by Raman spectroscopy

Kungen Tsutsui, T. Ikeda

研究成果: ジャーナルへの寄稿記事

37 引用 (Scopus)

抄録

This paper shows what structural properties of amorphous non-diamond phases in nanocrystalline diamond films are responsible for the transition from resistive to conductive films. The films incorporated with nitrogen, oxygen, and hydrogen are prepared by microwave plasma chemical vapor deposition using Ar-rich gas mixtures. The amount, composition, and bonding properties of non-diamond phases are studied mainly by Raman spectroscopy and compared with the electrical resistivity of the films. The addition of N2 gas decreases the resistivity down to the order of 10- 2 Ω cm for deposition temperatures above a threshold of ∼ 1100 K. Non-diamond phases for high n-type conductivity are characterized by graphitic components with improved sp2 bond angle order for trivalent carbon atoms in addition to C{double bond, long}N bonds. The addition of O2 or H2 gas promotes incorporation of oxygen or hydrogen into the films, not preferential etching of non-diamond phases. The resistivity increases or decreases largely by oxygen or hydrogen incorporation, respectively, then inversely changes by thermal annealing due to the deoxidization and dehydrogenation.

元の言語英語
ページ(範囲)753-756
ページ数4
ジャーナルDiamond and Related Materials
16
発行部数4-7 SPEC. ISS.
DOI
出版物ステータス出版済み - 4 1 2007

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Diamond films
Raman spectroscopy
Hydrogen
Oxygen
Gases
Conductive films
Dehydrogenation
Gas mixtures
Structural properties
Chemical vapor deposition
Etching
Nitrogen
Carbon
Microwaves
Annealing
Plasmas
Atoms
Chemical analysis
Temperature

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Chemistry(all)
  • Mechanical Engineering
  • Physics and Astronomy(all)
  • Materials Chemistry
  • Electrical and Electronic Engineering

これを引用

Conductive and resistive nanocrystalline diamond films studied by Raman spectroscopy. / Tsutsui, Kungen; Ikeda, T.

:: Diamond and Related Materials, 巻 16, 番号 4-7 SPEC. ISS., 01.04.2007, p. 753-756.

研究成果: ジャーナルへの寄稿記事

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