Control of large area VHF plasma produced at high pressure

Tatsuyuki Nishimiya, Tsukasa Yamane, Yoshiaki Takeuchi, Yasuhiro Yamauchi, Hiromu Takatsuka, Hiroshi Muta, Kiichiro Uchino, Yoshinobu Kawai

研究成果: ジャーナルへの寄稿記事

7 引用 (Scopus)

抄録

The control of very high frequency (VHF) discharge plasma at high pressures was attempted by loading a variable capacitor to the end of the multi rod electrode with which VHF plasma (frequency 60 MHz) was produced. It was found that the discharge region is controlled with the variable capacitor and VHF plasma uniform over 1 m is produced at high pressures.

元の言語英語
ページ(範囲)6931-6934
ページ数4
ジャーナルThin Solid Films
519
発行部数20
DOI
出版物ステータス出版済み - 8 1 2011

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very high frequencies
Plasmas
capacitors
Capacitors
plasma frequencies
plasma jets
rods
Electrodes
electrodes

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

これを引用

Nishimiya, T., Yamane, T., Takeuchi, Y., Yamauchi, Y., Takatsuka, H., Muta, H., ... Kawai, Y. (2011). Control of large area VHF plasma produced at high pressure. Thin Solid Films, 519(20), 6931-6934. https://doi.org/10.1016/j.tsf.2011.01.379

Control of large area VHF plasma produced at high pressure. / Nishimiya, Tatsuyuki; Yamane, Tsukasa; Takeuchi, Yoshiaki; Yamauchi, Yasuhiro; Takatsuka, Hiromu; Muta, Hiroshi; Uchino, Kiichiro; Kawai, Yoshinobu.

:: Thin Solid Films, 巻 519, 番号 20, 01.08.2011, p. 6931-6934.

研究成果: ジャーナルへの寄稿記事

Nishimiya, T, Yamane, T, Takeuchi, Y, Yamauchi, Y, Takatsuka, H, Muta, H, Uchino, K & Kawai, Y 2011, 'Control of large area VHF plasma produced at high pressure', Thin Solid Films, 巻. 519, 番号 20, pp. 6931-6934. https://doi.org/10.1016/j.tsf.2011.01.379
Nishimiya T, Yamane T, Takeuchi Y, Yamauchi Y, Takatsuka H, Muta H その他. Control of large area VHF plasma produced at high pressure. Thin Solid Films. 2011 8 1;519(20):6931-6934. https://doi.org/10.1016/j.tsf.2011.01.379
Nishimiya, Tatsuyuki ; Yamane, Tsukasa ; Takeuchi, Yoshiaki ; Yamauchi, Yasuhiro ; Takatsuka, Hiromu ; Muta, Hiroshi ; Uchino, Kiichiro ; Kawai, Yoshinobu. / Control of large area VHF plasma produced at high pressure. :: Thin Solid Films. 2011 ; 巻 519, 番号 20. pp. 6931-6934.
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