Control of optical and electrical properties of ZnO nanocrystals by nanosecond-laser annealing

T. Shimogaki, T. Ofuji, N. Tetsuyama, H. Kawahara, M. Higashihata, Hiroshi Ikenoue, Daisuke Nakamura, T. Okada

研究成果: 著書/レポートタイプへの貢献会議での発言

1 引用 (Scopus)

抜粋

Effects of laser annealing on electrical and optical properties of Zinc oxide (ZnO) nanocrystals, which are expected as building blocks for optoelectronic devices, have been investigated in this study. In the case of fabricating p-n junction in single one-dimensional ZnO nanocrystal, phosphorus-ions implanted p-type ZnO nanocrystals were recrystallized and recovered in the optical properties by nanosecond-laser annealing using a KrF excimer laser. Antimony-doped p-type ZnO nanocrystals were synthesized by irradiating laminated structure which antimony thin film were deposited on ZnO nanocrystals with the laser beam. Additionally, it is possible to control the growth rate of ZnO nanowires by using laser annealing. Irradiating with pulsed laser a part of ZnO buffer layer deposited on the a-cut sapphire substrate, then ZnO nanowires were grown on the ZnO buffer layer by the nanoparticle assisted pulsed laser deposition method. As a result, the clear boundary of the laser annealed and non-laser annealed area was appeared. It was observed that ZnO nanowires were grown densely at non-laser annealed area, on the other hand, sparse ones were grown at the laser-annealed region. In this report, the possibility of laser annealing techniques to establish the stable and reliable fabrication process of ZnO nanowires-based LD and LED are discussed on the basis of experimental results.

元の言語英語
ホスト出版物のタイトルOxide-Based Materials and Devices V
出版者SPIE
ISBN(印刷物)9780819499004
DOI
出版物ステータス出版済み - 1 1 2014
イベント5th Annual Oxide Based Materials and Devices Conference - San Francisco, CA, 米国
継続期間: 2 2 20142 5 2014

出版物シリーズ

名前Proceedings of SPIE - The International Society for Optical Engineering
8987
ISSN(印刷物)0277-786X
ISSN(電子版)1996-756X

その他

その他5th Annual Oxide Based Materials and Devices Conference
米国
San Francisco, CA
期間2/2/142/5/14

    フィンガープリント

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

これを引用

Shimogaki, T., Ofuji, T., Tetsuyama, N., Kawahara, H., Higashihata, M., Ikenoue, H., ... Okada, T. (2014). Control of optical and electrical properties of ZnO nanocrystals by nanosecond-laser annealing. : Oxide-Based Materials and Devices V [89870G] (Proceedings of SPIE - The International Society for Optical Engineering; 巻数 8987). SPIE. https://doi.org/10.1117/12.2039184