Control of radial density profile of nano-particles produced in reactive plasma by amplitude modulation of radio frequency discharge voltage

Kunihiro Kamataki; Kazunori Koga; Giichiro Uchida; Naho Itagaki; Daisuke Yamashita; Hidefumi Matsuzaki; Masaharu Shiratani

doi:10.1016/j.tsf.2012.07.059

Control of radial density profile of nano-particles produced in reactive plasma by amplitude modulation of radio frequency discharge voltage

Kunihiro Kamataki, Kazunori Koga, Giichiro Uchida, Naho Itagaki, Daisuke Yamashita, Hidefumi Matsuzaki, Masaharu Shiratani

研究成果: ジャーナルへの寄稿 › 学術誌 › 査読

8 被引用数 (Scopus)

抄録

We investigate uniformity of radial density profile of nano-particles in capacitively-coupled radio frequency discharge with an amplitude modulation (AM) of rf discharge voltage, by a two-dimensional laser light scattering method. Their densities at the center and that at the edge of the electrode increase by 3 and 24 times when the amplitude modulation level increases from 0 (without AM) to 30%. The uniformity of radial density profile of nano-particles is significantly improved by using the AM method.

本文言語	英語
ページ（範囲）	76-79
ページ数	4
ジャーナル	Thin Solid Films
巻	523
DOI	https://doi.org/10.1016/j.tsf.2012.07.059
出版ステータス	出版済み - 11月 15 2012

!!!All Science Journal Classification (ASJC) codes

電子材料、光学材料、および磁性材料
表面および界面
表面、皮膜および薄膜
金属および合金
材料化学

文献へのアクセス

10.1016/j.tsf.2012.07.059

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引用スタイル

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title = "Control of radial density profile of nano-particles produced in reactive plasma by amplitude modulation of radio frequency discharge voltage",

abstract = "We investigate uniformity of radial density profile of nano-particles in capacitively-coupled radio frequency discharge with an amplitude modulation (AM) of rf discharge voltage, by a two-dimensional laser light scattering method. Their densities at the center and that at the edge of the electrode increase by 3 and 24 times when the amplitude modulation level increases from 0 (without AM) to 30%. The uniformity of radial density profile of nano-particles is significantly improved by using the AM method.",

author = "Kunihiro Kamataki and Kazunori Koga and Giichiro Uchida and Naho Itagaki and Daisuke Yamashita and Hidefumi Matsuzaki and Masaharu Shiratani",

note = "Funding Information: This work was partially supported by a Grant-in-Aid for Scientific Research on Innovative Areas (no. 2109 ) of MEXT, Japan.",

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doi = "10.1016/j.tsf.2012.07.059",

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AU - Kamataki, Kunihiro

AU - Koga, Kazunori

AU - Uchida, Giichiro

AU - Itagaki, Naho

AU - Yamashita, Daisuke

AU - Matsuzaki, Hidefumi

AU - Shiratani, Masaharu

N1 - Funding Information: This work was partially supported by a Grant-in-Aid for Scientific Research on Innovative Areas (no. 2109 ) of MEXT, Japan.

PY - 2012/11/15

Y1 - 2012/11/15

N2 - We investigate uniformity of radial density profile of nano-particles in capacitively-coupled radio frequency discharge with an amplitude modulation (AM) of rf discharge voltage, by a two-dimensional laser light scattering method. Their densities at the center and that at the edge of the electrode increase by 3 and 24 times when the amplitude modulation level increases from 0 (without AM) to 30%. The uniformity of radial density profile of nano-particles is significantly improved by using the AM method.

AB - We investigate uniformity of radial density profile of nano-particles in capacitively-coupled radio frequency discharge with an amplitude modulation (AM) of rf discharge voltage, by a two-dimensional laser light scattering method. Their densities at the center and that at the edge of the electrode increase by 3 and 24 times when the amplitude modulation level increases from 0 (without AM) to 30%. The uniformity of radial density profile of nano-particles is significantly improved by using the AM method.

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